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  1. GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

    Multiple gases in one device: The GF40 Series elastomer sealed mass flow controllers and meters from Brooks Instrument feature our exclusive MultiFlo technology to maximize the efficiency and flexibility of your process tools.

  2. 122 Series Mechanical Pressure Gauges

    122 Series mechanical pressure gauges from offer reliable and efficient local pressure monitoring for the demanding high-purity applications.

  3. 8600 Series Mechanical Pressure Regulators

    8600 Series mechanical pressure regulators offer exceptional pressure output precision through high-resolution control of the supply pressure.

  4. SolidSense II® Pressure Transducers

    Solid Sense II® pressure transducers from Brooks maintain zero stability and high accuracy in ultra-high purity fluid storage and delivery systems.

  5. CMC Series Capacitance Manometers

    CMC Series capacitance manometers from Brooks Instrument are compact, economical unheated vacuum measurement gauges with all-welded construction.

  6. XacTorr® Series Capacitance Manometers

    Maximize the efficiency and performance of your vacuum-dependent processes with the XacTorr® Series digital vacuum capacitance manometers from Brooks.

  7. PC100 Series Metal Sealed Pressure Controllers

    PC100 Series metal sealed pressure controllers have an all-metal flow path for ultra-high purity semiconductor and chemical deposition processes.

  8. SLA7840 Metal Sealed Pressure Controller & Flow Meter

    The SLA7840 metal sealed pressure controller & flow meter features a high-purity metal seal and a co-planar valve to reduce pressure variation sensitivity.

  9. SLAMf Series Elastomer Sealed Pressure Controllers

    SLAMf Series elastomer sealed pressure controllers from Brooks Instrument deliver accurate, reliable pressure control in harsh production conditions.

  10. SLA5800 Series Elastomer Sealed Pressure Controllers

    The SLA5800 Series elastomer sealed pressure controllers from Brooks Instrument deliver stable, precise and ultra-accurate pressure control.