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  1. Cartridge III Valve

    The Cartridge III Valve is a multipurpose valve, designed for use with Brooks® purge meters in gas and liquid flow applications.

  2. NRS™ Needle Control Valves

    Brooks' NRS™ (non-rising stem) control valves are designed specifically for extremely low-flow gas and liquid applications.

  3. GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

    Multiple gases in one device: The GF40 Series elastomer sealed mass flow controllers and meters from Brooks Instrument feature our exclusive MultiFlo technology to maximize the efficiency and flexibility of your process tools.

  4. GCS400 Series Cylinder Scales

    GCS400 Series Cylinder Scales from Brooks Instrument are compact, low profile and engineered with a stainless steel housing for exceptional durability.

  5. Quantim® Series Coriolis Mass Flow Controllers & Meters

    Superior accuracy for ultra-low-flow gas and liquid measurement and control with Quantim® Coriolis mass flow controllers and meters from Brooks Instrument

  6. 9861 Series High Temperature Mass Flow Controllers & Meters

    9861 Series mass flow controllers and meters from Brooks Instrument for challenging high temperature delivery of condensable precursors and dopants.

  7. 5850EMH Series High Temperature Mass Flow Controllers

    5850EMH Series mass flow controllers from Brooks Instrument combine proven stability and metal-sealed purity for high-temperature processes.

  8. SLA5800 Series Elastomer Sealed Pressure Controllers

    The SLA5800 Series elastomer sealed pressure controllers from Brooks Instrument deliver stable, precise and ultra-accurate pressure control.

  9. SLAMf Series Elastomer Sealed Pressure Controllers

    SLAMf Series elastomer sealed pressure controllers from Brooks Instrument deliver accurate, reliable pressure control in harsh production conditions.

  10. 5866RT Elastomer Sealed Pressure Controller & Flow Meter

    The 5866RT metal sealed pressure controller & flow meter from Brooks combines accuracy with a high-integrity metal seal to prevent flow contamination.