Challenge: Improve gas management in ultra-high purity processes
Many fabs have bulk gas sources and cabinets positioned at great distances from the tools they supply. Accurate and controlled delivery of those gases 24/7 is crucial to tool utilization and uptime – so implementing pressure transducers and transmitters that measure, track and communicate pressure levels, and generate alerts when pressures fall out of set points is equally crucial.
Solution: SolidSense II® Pressure Transducers
Brooks SolidSense II® pressure transducers are engineered to handle the complex and sometimes harsh gases used in today’s most cutting-edge semiconductor processes and nodes. They combine weld-free, corrosion-resistant materials along with accuracy within 0.25% of full scale. And by utilizing a unique, one-piece sensor machined from high-quality stainless steel, SolidSense II transducers exhibit excellent long-term stability, regardless of the gas being measured.