Challenge: Find cost-effective ways to manage pressure better
To improve control of process gas pressure, it needs to be accurately measured at key points throughout a gas delivery system—not just on either side of the MFC. If pressure deviates from setpoints, there could be a dangerous leak or blockage at a key piping junction or isolation point.
Solution: Proven Brooks Instrument Pressure Switches & Transmitters
Combining exceptional versatility with proven, cost-effective functionality in semiconductor and industrial production facilities worldwide, Brooks Instrument offers a broad range of pressure gauges, pressure switches and transmitters employing durable designs and materials selected to deliver reliable and accurate performance in high-purity semiconductor gas delivery processes.