Product Type
Mass Flow Controller
Differentiator
Large installed base with proven long term performance
Flow Range (Full Scale Capacity)
.06 sccm - 30,000 sccm
Accuracy
1% F.S. incl. linearity
1.5% F.S. incl. linearity >20 slpm
Linearity
±0.5% F.S. (included in accuracy)
Response Time
Normally Closed Valve: <3 sec
Optional: 600 msec
Multi-Gas & Range Configurability
Pressure Transient Insensitivity
—
Zero Stability
< ±0.5% F.S. per year
Level of Purity / Surface Finish
316L VAR, 316L, and high alloy
ferritic stainless steel
Wetted Materials
Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®
Valve Options
Normally Closed, Normally Open
Meter (no valve)
Differential Pressure Range
5 - 50 psi (gas and range dependent)
Leak Integrity
1x10-10 atm cc/sec He
Status Lights
MFC Health, Network Status
Alarms
Control Valve Output, Network Interruption
Diagnostic / Service Port
Electrical Connection
15 Pin D Connector (DA-15P)
Power Supply / Consumption
Normally Closed valve: 3.25 watts
Normally Open valve: 10.5 watts