9861 Series High Temperature Mass Flow Controllers & Meters

Improve high temperature flow control accuracy and efficiency.

Models 9861

Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature thermal mass flow controllers and meters from Brooks Instrument feature a high purity, high leak integrity metal flow path ensuring compatibility with all process gases and vapors. The patented IsoSensor™ is a high stability flow sensor compatible with the elevated environmental temperatures found in heated gas lines and baking systems. The ultra-low drift performance of the IsoSensor™ reduces the need for frequent re-zeroing and recalibration typical in high temperature applications.

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9861 Series Data Sheet

Features

Ultra-stable patented IsoSensor™ flow measurement sensor
Ultra-high purity flow path
Remote electronics come standard with two analog electrical connectors
Digital measurement and control architecture

Benefits

High stability sensor delivers superior uptime, reducing maintenance and lowering total cost of ownership
All-metal wetted flow path ensures integrity and purity of gas/vapor
Included 20 pin card edge and a 9 or 15 pin “D” connector enables standardization and reduces inventory
Enhanced accuracy and process control

Applications

Optical fiber manufacturing - MCVD
Silicon semiconductor device fabrication processes

Product Type

Mass Flow Controller

Differentiator

Highest Flow Accuracy

Highest Operating Temperature

Digital Communication

Performance

Flow Range (Full Scale Capacity)

10 slm (N₂ equivalent)

Accuracy

1% of SP@ 35 - 100% FS

0.35% of FS @ <35% FS

Repeatability

<±0.15% FS

Linearity

±0.5% FS (included in accuracy)

Response Time

<1 sec to within 2% of SP (per SEMI E17-91)

Zero Stability

<±0.5% FS per °C

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

4 μ inch R_a

Wetted Materials

316L SS/ KM-45/ 304 SS/ MO+

Valve Options

Normally Closed

Meter (no valve)

Ratings

Max Temperature

150^oC

Differential Pressure Range

1.33 - 350 kPa (10 torr - 50 psia)

*Contact Brooks Technical Support for more information.

Max Pressure

620 kPa (90 psi)

Leak Integrity

1x10^-10 atm cc/sec He

Electrical

Diagnostic Capability

—

Analog Communication

0-5 Vdc

Digital Communication

RS485 L-Protocol (via dual RJ11 ports)

Electrical Connection

Analog via 9- or 15-Pin "D" connector & 20 Pin Card Edge connector

Power Supply / Consumption

Controller (Analog & RS-485L): 5 Watts max @ ±15 Vdc (160 mA max)

Meter (Analog): 5 Watts max @ ±15 Vdc (50 mA max)

	9861
Flow Range (Full Scale Capacity)	3 sccm - 10 slm (N₂ equivalent)
Surface Finish	4µ inch R_a
Accuracy	±1% SP @ 35 - 100% FS ±0.35% FS @ <35% FS
Repeatability	< ±0.15% FS
Response Time	≤ 1 sec to within 2% of SP (per SEMI E17-91)
Analog Communication	0-5 Vdc
Digital Communication	RS485L Protocol

Filename	File Type	Documents By Language
Data Sheet	pdf	English
Installation & Operation Manual	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: 9861 - 4R - U

Meter Series	Process Connection	Connector
9861	4R - 1/4” VCR	T - 9 pin D connector & 20 pin card edge connector & dual RJ11 ports, 0-5 VDC
	3R - 3/8” VCR	U - 15 pin D connector & 20 pin card edge connector & dual RJ11 ports, 0-5 VDC

Filename	File Type
9861-4R-U	STEP
9861-4R-U	IGS
9861-4R-U	DXF

9861 Series High Temperature Mass Flow Controllers & Meters

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Features

Benefits

Applications

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