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PROFINET Bus System Files


The PROFINET interface is available on Brooks Instrument SLA Series Mass Flow Controllers & Meters.

PROFINET is an Ethernet-based communications system for industrial automation applications built upon the IEEE 802 standards for Ethernet and is standardized in IEC 61158 and IEC 61784. PROFINET incorporates elements of TCP/IP communications standards and has defined its own messaging protocols to minimize latencies TCP/IP protocols introduce. This solution leverages the power of the internet and enterprise connectivity, combined with the functionality and comprehensive suite of messages and services for manufacturing automation applications.


  • PROFINET comes fully integrated into the industry-leading SLA5800 and SLAMf Series MFCs. No add-on adapter needed.
  • Compatible with Siemens and other PLCs.
  • Newly expanded, embedded diagnostic and alarm capabilities provide pedigree, performance and reliability data from the MFC, enabling preventive maintenance that helps improve overall equipment effectiveness and flexibility.
  • SLA Series Mass Flow Controllers & Meters are a conformance class B PROFINET IO device and conform to PI specifications.
If you have any questions, please contact Technical Services or your local Brooks Instrument representative for assistance.


FilenameFile TypeDocuments By Language
PROFINET Supplemental Manual SLA5800, SLAMf pdf English German