SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

EtherCat Mass Flow ControllerHATFIELD, Pa. (April 14, 2016) – Celebrating its 70th anniversary, Brooks Instrument will be exhibiting at SEMICON West 2016 with new mass flow controllers (MFC) equipped with the high-speed EtherCAT® interface, along with a broad range of other mass flow meters, controllers, vaporizers and capacitance manometers for semiconductor manufacturing.

The show runs July 12-14 at the Moscone Center in San Francisco. Brooks Instrument will be located in the South Hall at booth 1323.

A world leader in advanced flow, pressure, vacuum and vapor delivery solutions, Brooks Instrument will showcase key components in its MFC portfolio designed to meet critical gas chemistry control challenges and improve process yields for sub-20nm nodes. This includes the company’s newly enhanced GF100 Series MFCs with high-speed EtherCAT connectivity, as well as the GF135 advanced diagnostic MFC.

With its 70-year history in leading technology development, Brooks Instrument is focused on improving the precision and performance of mass flow, pressure and vacuum technologies to help enable advanced semiconductor manufacturing. Key items at SEMICON West include:

GF100 Series MFC with High-Speed EtherCAT Connectivity: Brooks Instrument has enhanced its industry-leading GF100 Series MFCs with high-speed EtherCAT interfaces for both high-flow and low-flow applications.

Responding to rapidly evolving requirements for next-generation tools and fabs, the GF100 Series features several additions to help boost process yields and productivity:

  • Embedded diagnostics to leverage real-time EtherCAT data acquisition capabilities for advanced fault detection and classification;
  • An ultra-stable flow sensor (less than 0.15 percent of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements;
  • Improved valve shutdown reduces valve leak-by, minimizing potential first wafer effects;
  • Enhancements to the GF100 advanced pressure transient insensitivity to less than 1 percent of S.P. with five PSI per second pressure perturbations, which reduces crosstalk sensitivity for consistent mass flow delivery.

GF135 Advanced Self-Diagnostic PTI MFC: The GF135 is the first “smart” pressure transient insensitive (PTI) MFC that can perform self-diagnostics such as integral rate-of-decay flow measurement without stopping the flow of process gas. This provides a competitive advantage, allowing semiconductor manufacturers to verify process gas accuracy, check valve leak-by, and monitor sensor stability in real time without removing the flow controller from the gas line – saving thousands of dollars in lost productivity.

With this unique real-time error detection technology, process and equipment engineers can reduce wafer scrap and lost production time from unacceptable flow deviations and unnecessary preventative maintenance checks. The Brooks Instrument GF135 PTI MFC also offers industry leading actual process gas accuracy and fast flow settling time for ascending and descending set points, helping to improve productivity and chamber-to-chamber matching.

Interactive Demonstration: The Brooks Instrument booth will include an interactive mass flow control demonstration where attendees can watch real-time gas flow error detection and advanced diagnostics on the GF135 MFC. Applications engineers will also be available to answer questions about the latest technologies to enhance process control, improve chamber matching and support process yield programs for semiconductor manufacturing. In addition, attendees are encouraged to visit the company in booth 1323 to share in its 70th anniversary celebration.    

For more information about the complete range of Brooks Instrument products and solutions for semiconductor applications, visit

EtherCAT® is a registered trademark and licensed by Beckhoff Automation GmbH