金属密封热式质量流量控制器和仪表
现今许多高级电子元器件的加工工艺都需要能够对昂贵的超纯气体和液态前体进行相当准确并且具有高度可重现性的测定和控制。因此，布鲁克斯仪器推出了自家的革命性金属密封热质量流量控制器和仪表来满足上述需求。该产品将稳定性和准确性超高的测量传感器与快速、精准的控制阀以及功能强大的电子元件相结合共同实现了精准的化学品控制。高完整性（无泄漏）的超高纯度全金属流路可确保过程化学品纯度，该流路专为防止外部污染（如湿气和氧气）腐蚀过程媒介而设计。
关键应用
- 硅材料半导体器件制造工艺 – 蚀刻、剥膜、CVD、ALD、PVD、Epi、扩散、植入和 RTP
- 化合物半导体器件加工工艺 – MOCVD
- 精密的表面涂层
- 分析系统
- 真空处理应用
选择最适合自身工艺需求的质量流量设备。
产品
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| 产品类型 |
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Controller |
| 区别 |
EtherCAT Communication High Purity/Ultra-High Purity Embedded Diagnostics Ultra-stable Flow Sensor Improved Valve Shutdown |
High Purity/Ultra-High Purity Standard GF Series High Flow GF Series Ultra-Fast Response Time Pressure Transient Insensitivity |
High Purity |
Large installed base with proven long term performance |
| 流量范围-满量程容量-液体 | — | — | — | — |
| 密封材料 | Metal | Metal | Metal | Metal |
| 纯净等级 |
5 - 10µ inch Ra |
4 - 10µ inch Ra | 16µ inch Ra |
316L VAR, 316L, and high alloy ferritic stainless steel |
| 精度 |
Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20% High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
±1% S.P. > 35-100% ±0.35% F.S. 2-35% |
±1% S.P. 35-100% ±0.35% F.S. < 5-35% |
1% F.S. incl. linearity 1.5% F.S. incl. linearity >20 slpm |
| 重复性 | < ±0.15% S.P. | < ±0.15% S.P. | < ±0.2% S.P. |
0.2% of rate |
| 响应时间-常闭 |
Normally Closed Valve: 300 ms - < 1 sec SDS Gas Delivery: < 3 sec |
Normally Closed Valve: 300 ms - < 700 ms 700 ms - < 1 sec SDS Gas Delivery: < 3 sec |
Normally Closed Valve: <1 sec |
Normally Closed Valve: <3 sec Optional: 600 msec |
| 瞬时压力波动不敏感 |
Specific models |
<5% S.P. for up to 5 psi/sec upstream press. spike |
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| 多气体多量程 | MultiFlo™ Standard (most models) | MultiFlo™ Standard (most models) | MultiFlo™ Available |
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| 诊断能力 |
Available
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Available
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Available
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| 模拟通讯 |
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0-5 Vdc |
0-20 mA 4-20 mA 0-5 Vdc 0-10 Vdc |
4-20 mA 0-5 Vdc |
| 数字通讯 |
EtherCAT® |
DeviceNet™ RS485 L-Protocol |
DeviceNet™ Profibus® RS485 S-Protocol RS485 L-Protocol RS485 A-Protocol (GF081)
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