Skip links

HOLIDAY HOURS: Our U.S. and European facilities will be closed on April 10th in recognition of Good Friday. Normal business hours will resume on Monday, April 13th. Please contact your local Brooks Instrument office for specifics.

Please read our COVID-19 update.

5866RT Elastomer Sealed Pressure Controller & Flow Meter

Versatility for high pressure applications across a wide flow measurement range.
Models 5866RT

The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.


Talk to one of our application engineering experts by calling: 1-888-554-3569

For pricing information:

Request a Quote
5866RT Data Sheet


  • Integral pressure transducer
  • Response time: <0.8 seconds
  • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
  • Wide range of full scale pressures (Max pressure 1500 psig)
  • Optional metal seal available
  • Electro-polished wetted surfaces (optional)
  • Electrically activated valve override
  • Suitable for upstream or downstream control
  • Analog interface


  • Eliminates droop, hysteresis and boost
  • High leak integrity
  • More control over pressure and flow
  • Dynamic tuning adjustments with top mounted DIP switches


  • Thin-film processes
  • Chemical research
  • Petrochemical research
  • Laboratory
  • Fuel cell
  • Life science
Product Type

Pressure Controller & Flow Meter


Remote Transducer

Pressure Control & Flow Measurement

Flow Range (Full Scale Capacity)

Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.


Flow Accuracy:

 ±1% F.S. including linearity at the calibration conditions

±1.5% F.S. for flow rates greater than 20 slm


±0.25% of rate

Flow Temperature Coefficient

0.1% F.S. per °C

Pressure Range
Dependent upon remote pressure transducer
Pressure Control Range

100:1 for a remote transducer with a 0-10 V output

Response Time

Pressure Response Time:

< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.

Actual pressure response depends on system design.

Max Pressure
1500 psig
Temperature Range
0 - 65°C
Leak Integrity

Inboard to Outboard

Metal Seal: 1 x 10-10 atm cc/sec He max 

Elastomer Seal: 1 x 10-9 atm cc/sec He max

Seal Material
Elastomer or Metal
Wetted Materials

Wetted Parts: Standard 316L/316L VAR Stainless Steel

Valve Seat: Standard Viton® fluoroelastomers or metal

External/Internal Seals: flouroelastomers or metal

Optional: Buna-N, Teflon® or Kalrez®

Valve Options

Normally Closed

Normally Open

No Valve (elastomer, upstream configuration only)

Analog Communication

0-5 V

Digital Communication

Electrical Connection

15-Pin "D" Connector

Power Supply / Consumption

Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA

Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

Diagnostic Capability


EMC Directive 89/336/EEC EN 61326-1




Flow Range (Full Scale Capacity)

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

Pressure Control Range

100:1 for a remote transducer with a 0-10 V output

Max Pressure

1500 psig

Seal Material

Elastomer or Metal Seal

Electrical Connection

15-Pin "D" Connector

FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English