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Capacitance Manometers

Advanced manometer technology delivers sustained vacuum accuracy.

Every vacuum chamber process has a precise Torr level it must reach to sustain process yields. With industry-leading advanced sensor design features, capacitance manometers from Brooks Instrument are designed to improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. And because they are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.

KEY APPLICATIONS

  • Superconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Select the capacitance manometer that best meets your project requirements.

PRODUCTS

CMC Series
CMC Series
XacTorr Series
XacTorr Series
Product Type Capacitance Manometer Capacitance Manometer
Differentiator

Unheated

Heated or Unheated

Analog or Digital

 

Pressure Range

10, 20, 50, 100, 500 and 1000 Torr Full Scale

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available

Accuracy

Type A=0.25% of reading

Type B=0.5% of reading

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading,

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Temperature Ambient

CMX0 Ambient

CMX1 45°C

CMX2 100°C

Analog Communication

0-10 Vdc (<10k Ohm load)

0-10 Vdc 5k Ohm load
Digital Communication

DeviceNet™

RS485

Size Compact Large