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HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

Pressure & Vacuum Products

Innovative pressure and vacuum measurement instruments. World-class accuracy and reliability.

Any time you are measuring flow, you probably also need to measure pressure or vacuum – and we can help. For decades, Brooks Instrument has been a leader in flow measurement and control technology. Today, we are a global leader in precision fluid measurement and control that includes a proven portfolio of pressure and vacuum gauges, transducers, controllers, regulators and capacitance manometers to satisfy the most demanding process requirements.

Featuring world-class accuracy and repeatability, our pressure and vacuum products can help you fine-tune the results your processes deliver.

Our pressure and vacuum technology is used by semiconductor OEMs, gas cabinet suppliers and vacuum system manufacturers including thin-film deposition systems and high-tech specialty furnaces. Our portfolio includes regulators and sensors that precisely measure and control pressures ranging from vacuum to 3000 psi; we have technology that will solve your gas and vacuum sensing and regulating challenges with:

  • Ultra-high purity pressure transducers for the most stringent gas measuring challenges
  • Stainless steel pressure gauges, switches and transmitters for local measurement that is accurate and cost-effective
  • Industry-leading, high-accuracy capacitance manometers for controlling the most critical vacuum processes
SolidSense II Pressure Transducer Cutaway

SolidSense II, Pressure Transducer
Capacity
60, 100 or 300 lbs
Size
Compact
Certifications/Approvals

FM and ATEX

Pressure Range
-15 psi - 4,000 psi
Accuracy
1% Full Scale
Materials of Construction
Aluminum or Stainless Steel
Pressure Range

-15 psi - 3000 psi

Accuracy

0.25 % Full Scale

Certifications/Approvals
CE, FM and ATEX
Max Pressure
4500 psia
Max Temperature
65°C
Max Pressure
500 psig
Temperature
65°C
Pressure Range

100 mTorr- 1000 Torr

Accuracy

0.15 - 0.2% of Reading

Temperature Range
Ambient - 160 oC