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HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

Metal Sealed Pressure Controllers

Stable pressure control and enhanced process gas purity. Maximized process results.

Metal sealed pressure controllers from Brooks Instrument are designed to be reliable and durable while delivering the sustained and proven accuracy users worldwide count on from the leader in fluid measurement and control. Our electronic pressure controllers utilize the core control technology present in our industry-leading thermal mass flow controllers.

Electronic pressure controllers eliminate the droop and hysteresis associated with traditional mechanical spring diaphragm pressure regulators. And, choosing a metal sealed pressure controller brings enhanced purity of the gas due to elimination of oxygen permeation through elastomers, with a reduction in maintenance since metal seals will last indefinitely.

Brooks pressure controllers are available with internal pressure sensors to control pressure in a range from torr to 500 psig. The result: pressure controllers that keep critical semiconductor processes on-target and under the most stringent control – hour after hour, day in and day out.

Key Applications

  • Silicon semiconductor device fabrication processes – Etch, Strip, CVD, ALD, PVD, Epi, Diffusion, Implant and RTP
  • Compound semiconductor device fabrication processes – MOCVD
  • Precision engineered surface coatings
  • Analytical systems
  • Vacuum processes applications

Select the pressure control device that best meet your project requirements.

PRODUCTS

SLA7840
SLA7840
PC100 Series
PC100 Series
Product Type

Pressure Controller & Flow Meter

Pressure Controller
Differentiator

Control Mode: Downstream or Upstream

Remote Transducer

Wide Flow & Pressure Range

Control Mode: Downstream or Upstream

Ultra-High Purity

Digital Pressure Control

Pressure Control Range

20:1

> 2 to 100%

Flow Range (Full Scale Capacity)

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

10 slm (N2 or H2 only)

Accuracy

±1% of rate 20-100% F.S.

±0.2% F.S. < 20% F.S.

Pressure Reading: ± 1% of reading

Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S.

Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S

Response Time

< 1 sec typical for a 20-100% setpoint step with max 2% overshoot.

Actual pressure response depends on system design.

< 1 sec typ. (excluding system time constant)

Repeatability

±0.2% of rate

< ±0.2% F.S.

Seal Material Metal Metal
Level of Purity / Surface Finish

32 µ inch Ra

5 µ inch Ra

Diagnostic Capability Available

Available

Analog Communication

0 - 5 Vdc

Digital Communication DeviceNet™

DeviceNet™