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PC100 Series Metal Sealed Pressure Controllers

Accuracy under pressure. Precision under control.
Models PC115 / PC125

The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.

Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime.

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

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Features

  • Response time: <1 second
  • Full-scale flow rates up to 10 slm
  • Transducer pressure range: 1000 Torr FS
  • All-metal seal flow path: 5µ inch Ra surface finish
  • PC125 with embedded flow meter includes a highly corrosion-resistant Hastelloy® C-22 flow sensor combined with high-speed ARM processor
  • Fast-acting diaphragm-free valve assembly
  • High-visibility LCD display with easily accessible push button for local indication of flow, temperature and network address
  • Independent diagnostic/service port
  • DeviceNet™ protocol

Benefits

  • High-performance components enable fast response and setting time for improved pressure control
  • Reduced diverted gas consumption and associated abatement costs
  • All metal, corrosion resistant SEMI F20 compliant wetted flow path with overall reduced surface area and un-swept volumes ensures faster dry-down during purge steps
  • Long-term thermal or pressure sensor device stability maximizes yield and throughput
  • User-programmable start-up function for processes requiring a slow-ramped pressure control

Applications

  • Semiconductor advanced etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
 

 

Product Type
Pressure Controller
Differentiator

Control Mode: Downstream or Upstream

Ultra-High Purity

Digital Pressure Control

Performance
Flow Range (Full Scale Capacity)

10 slm (N2 or H2 only)

Accuracy

Pressure Reading: ± 1% of reading

Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S.

Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S

Repeatability

< ±0.2% F.S.

Flow Temperature Coefficient

Zero: < 0.05% F.S./°C

Span: < 0.08% of reading/°C

Max Pressure

1000 Torr FS

Pressure Control Range

> 2 to 100%

Response Time

< 1 sec typ. (excluding system time constant)

Temperature Range
10 - 50°C
Leak Integrity

External: 1 x 10-10 atm scc/sec He max

Mechanical
Seal Material
Metal
Level of Purity / Surface Finish

5 µ inch Ra

Wetted Materials

SEMI F20 HP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

Valve Options

Normally Closed

Electrical
Diagnostic Capability
Available

Analog Communication

Digital Communication

DeviceNet™

Electrical Connection

DeviceNet™ via 5-Pin "M12" Connector

Power Supply / Consumption

DeviceNet™: 545 mA max @ +11-25 Vdc

PC115

PC125
Differentiator

Control Mode: Downstream and Upstream

Embedded Thermal Flow Sensor: No

Control Mode: Downstream

Embedded Thermal Flow Sensor: Yes

Flow Range (Full Scale Capacity)

20 sccm - 5 slm (N2 and H2 only)

10 slm (N2 and H2 only)

Pressure Control Range

Downstream: >2 to 100%

Upstream: >15 to 100%*

*Assuming hard vacuum on the outlet and 150 Torr min DP to achieve max flow

>2 to 100%

Max Pressure

Transducer Pressure Range: 1000 Torr F.S.

Transducer Over Pressure Limit: 2 x F.S. range

Transducer Pressure Range: 1000 Torr F.S.

Transducer Over Pressure Limit: 2 x F.S. range

Seal Material

Metal Seal

Metal Seal

Electrical Connection

DeviceNet™ via 5-Pin "M12" Connector

DeviceNet™ via 5-Pin "M12" Connector

FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
DeviceNetâ„¢ Supplemental Manual - PC100 Series pdf English
0254 Series
Controls and powers up to 4 devices