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A New Class of MFCs with Embedded Flow Diagnostics

October 14, 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

Brooks Instrument Experts Discuss Mass Flow Technology at the Institute for Electronics and Nanotechnology at Georgia Tech’s Industry Seminar Series

October 10, 2016
IEN Industry seminar provides insight on mass flow measurement and control issues for high-purity manufacturing applications.

SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

July 11, 2016
Powerfully enhanced GF100 Series MFCs will help improve semiconductor process performance, productivity and yields.