Skip links

HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

SLA5800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Advance and simplify your mass flow control.
Models SLA5850 / SLA5860 / SLA5851 / SLA5861 / SLA5853 / SLA5863

Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable output on the other side. That’s the advanced simplicity you get with the SLA5800 Series mass flow controllers and meters.

The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with advanced, configurable multi-gas/multi-range capabilities, they offer a better zero drift specification compared to competitive products and have been proven to maintain factory calibration and accuracy longer.

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

Want to see it in action?

Request a Demo

Need the numbers?

Get a Quote

Features

  • Long-term zero stability of <0.2% full scale per year
  • Excellent accuracy
  • Wide range of flow ratings - from 0.003 up to 2500 lpm
  • Highest pressure ratings - up to 1500 psi/100 bar (optional: 4500 psi/310 bar)
  • Programmable multi-gas/multi-range capabilities
  • Independent & easily accessible diagnostic/service port
  • Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and RS-485 plus analog interfaces
  • Modular design is easy-to-service at the factory or in the field

Benefits

  • Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership
  • Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points
  • Choose one device platform for different gases and flow ranges
  • Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory
  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation
  • Durable, robust metal top lid prevents damage during installation
  • Multi-protocol communication interface simplifies integration into existing systems 
  • Superior metrology and primary calibration systems based on global standards ensure accuracy

Applications

  • Chemical and petrochemical catalyst research and pilot processes
  • Laboratory and analytical systems
  • Fuel cell technology
  • Life sciences bioreactors
Product Type
Mass Flow Controller
Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

Performance
Flow Range (Full Scale Capacity)
.003 - 2500 lpm
Accuracy

0.9% of SP (20-100% FS)

0.18% of FS (2-20% FS)

1-50 slpm: 0.18% of SP (1-20% FS)

1100 slpm up to 2500 slpm: 1.0% of FS

Repeatability

0.20% SP

Linearity

Included in accuracy

Response Time

0.003 - 100 slpm: <1 second

100 - 2500 slpm: <3 seconds

Multi-Gas & Range Configurability

Standard

Max Pressure

.003-100 slpm: 1500 psi/100 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

Control Range

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

Zero Stability

< 0.2% F.S. per year

Flow Temperature Coefficient

Zero: <0.05% of F.S per oC

Span: <0.1% of S.P. per oC

Pressure Coefficient

0.03% per psi (0-200 psi N2)

Attitude Sensitivity

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

Ratings
Max Temperature
65oC
Differential Pressure Range

Controllers

.003 - 50 lpm: 5 psi / 0.35 bar

50 - 100 lpm: 10 psi / 0.69 bar

500 lpm: 7.5 psi / 0.52 bar

1000 lpm: 14.5 psi / 1.00 bar

2500 lpm: 35.0 psi / 2.41 bar

 

Leak Integrity
1x10-9 atm cc/sec He
Mechanical

Seal Material
Elastomer Seal
Wetted Materials

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

Valve Options

Normally Closed

Normally Open

Meter (no valve)

Diagnostics

Diagnostic Capability
Available

Status Lights

MFC Health, Network Status

Alarms

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

Diagnostic / Service Port
RS485 via 2.5mm jack

Electrical

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™
FOUNDATIONTM Fieldbus
EtherCAT®
Profibus®
RS485 

Electrical Connection

DeviceNet™: 1xM12 with threaded coupling nut (B)

Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

Power Supply / Consumption

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts

Compliance
Certifications/Approvals

CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

Environmental Compliance

RoHS

Size
Medium
SLA5850 SLA5860 SLA5851 SLA5861 SLA5853 SLA5863
Product Type Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter
Differentiator

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Flow Range (Full Scale Capacity) 0.003 - 50 lpm 0.003 - 50 lpm 15 - 100 lpm 15 - 100 lpm 100 - 2500 lpm 100 - 2500 lpm
Max Pressure

1500 psi / 100 bar

Optional 4500 psi / 310 bar

1500 psi / 100 bar

Optional: 4500 psi / 310 bar

1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar 1000 psi / 70 bar
Accuracy

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

Repeatability 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P.
Response Time <1 second <1 second <1 second <1 seconds <3 seconds

<3 seconds

Multi-Gas & Range Configurability Standard Standard Standard Standard Standard Standard
Diagnostic Capability

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Analog Communication

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485


DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

FilenameFile TypeDocuments By Language
Data Sheet pdf English German
Installation & Operation Manual pdf English
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
RS485 Supplemental Manual - SLA5800, SLAMf pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: SLA5810 - A - 1B - 1 - C - RevB

Meter Series
  Digital Communications I/O

Mechanical Connection
(Body size 0 & 1 only)

  Valve Type
Analog Communications I/O
Revision Level
SLA5810
  A - None (select applicable analog I/O)
 1A - w/o adapters, 9/16” - 18 UNF
   0 - None (Sensor only)
 A - None - Digital Communications only
 RevB
SLA5820
  D - DeviceNet I/O (with 5-pin micro connector)
 1B - 1/4” tube compression
   1 - Normally closed
 B - 0-5 V / 0-5 V 15-pin D-conn  
SLA5840
  P - Profibus (2x sub-D)
 1C - 1/8” tube compression
   2 - Normally closed
   (Pressure diff. >30 psig (2 bar))
 C - 4-20 mA / 4-20 mA 15-pin D-conn
 
SLA5850
  S - RS485 (select applicable analog I/O)
 1D - 3/8” tube compression
   3 - Normally closed
   (Pressure diff. <30 psig (2 bar))
 L - 1-5 V / 1-5 V 15-pin D-conn
 
     1E - 1/4” VCR
   4 - Normally closed - high pressure
 M - 0-20 mA / 0-20 mA 15-pin D-conn
 
     1F - 1/4” VCO
   5 - Normally open
 0 - 0-10 V / 0-10 V 15-pin D-conn
 
     1G - 1/4” NPT
   1 - 0-5 V / 4-20 mA 15-pin D-conn
 
     1H - 6 mm tube compression
   2 - 0-5 V / 0-20 mA 15-pin D-conn
 
   
 *See data sheet for more options

   *See data sheet for more options
 
    (Body size 3 only)
     
     2A - Without adapters, 9/16” - 18 UNF
     
     2B - 1-1/16”-12 SAE/MS
     
     2C - 3/8” tube compression
     
     2D - 1/2” tube compression
     
   
*See data sheet for more options

 

 
0254 Series
Controls and powers up to 4 devices
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of SLA and SLAMf Enhanced Series MFCs and Pressure Controllers.
Brooks LabVIEW™ DLL

Enables users to set-up communication with Brooks® digital MFCs and/or secondary electronics without requiring a licensed LabVIEW program.

Smart DDE

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.