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Vaporization Products

Advanced vaporization technology enables purer and more efficient vapor production.

Many industrial and semiconductor processes need to convert liquids including both water and other liquid precursors  into highly controlled and pure vapors. Brooks Instrument offers a range of vapor delivery and direct liquid injection vaporization technologies to satisfy key process requirements such as vapor purity, throughput and cost-effectiveness.

Vaporization is a phase transition from the liquid phase to gas phase. A vaporizer therefore, is any system that converts a liquid material to a gaseous state. While vaporization is achieved in a number of different ways, all modern vaporizers have several common characteristics:

  • Increase temperature and/or reduce ambient pressure of the liquid
  • Enclosed systems to capture and control vapor flow
  • Utilize feedback & control loop system to regulate vaporization rate


  • Water vaporization/humidification
  • Chemical vapor deposition
  • Depositing thin films for enhanced thermal, optical or hardness characteristics
  • Vaporizing monomers for vacuum polymer film disposition
  • Generating calibration vapor
  • Vaporizing liquid hydrocarbons
Brooks vapor products illustration

Enthalpy of System,
  • Etch equipment vapor delivery
  • Pure water vapor-only applications
  • Ultra-high purity and low flow
  • Sub atmospheric process chambers only
Product Type
DI Water Vapor Delivery Module

High Purity Vapor

Highest Flow Accuracy

Compact Design

Vaporization Method
Vapor Draw
Fluid Type
DI Water
Max Vapor Capacity

3000 sccm (DI Water) 

Heater Power
260 Watts
Max Pressure
200 Torr
Max Temperature
  • Vaporize full range of fluids
  • Extremely fast response time
  • Complete vaporization with high repeatability
  • Both industrial and  advanced semiconductor process
  • Wide range of flow rates
  • Utilizes carrier gas to atomize the liquid then vaporize it
Product Type
Flexible, high purity, indirect vaporization-on-demand for most liquid precursors
Vaporization Method

Direct Liquid Injection, Flash Vaporization

Fluid Type

DI Water, Metal Halides, Metal Organics, Other

Max Vapor Capacity

83 gm/min (H2O equivalent)

Heater Power
200 - 6000 Watts
Max Pressure

1500 psig

Max Temperature