Skip links

HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.
Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability. 

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

Want to see it in action?

Request a Demo

Need the numbers?

Get a Quote

Features

  • Available for process ranges from 10 Torr to 1000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces

Benefits

  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses

Applications

  • Superconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
Product Type
Capacitance Manometer
Differentiator

Unheated

Performance
Temperature
Ambient
Pressure Range

10, 20, 50, 100, 500 and 1000 Torr Full Scale

Accuracy

Type A = 0.25% of Reading

Type B = 0.50% of Reading

Measurement Range
4 Decades
Temperature Effect

On Zero

0.002% FS / °C

 

On Span

0.02% FS / °C

Mechanical
Exposed Materials
Inconel
Over Pressure Limit
45 psia
Size
Compact
Electrical
Analog Communication

0-10 Vdc (<10k Ohm load)

Digital Communication

Electrical Connection

15-Pin DSub on 6” cable

9-Pin DSub

5-Pin terminal strip

Power Supply / Consumption
< 200 mW
Certifications/Approvals
EMC

CE

Directive 89/336/EEC

CMC
Temperature Ambient
Pressure Range 10, 20, 50, 100, 500, 1000 Torr
Accuracy

±0.25% of reading

±0.50% of reading (optional)

Analog Communication 0 - 10 Vdc
Digital Communication
FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English