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Digital, Metal-Sealed Thermal Mass Flow Meters & Thermal Mass Flow Controllers - Gas
Overview
Brooks offers three series of mass flow controllers / mass flow meters for applications requiring high leak integrity and/or ultra-high purity (UHP). These devices are designed with a 1.125” wide profile providing an efficient, space-saving footprint.The GF Series is our newest addition to this product line. GF Series is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers. Brooks’ new sensor technology with improved signal to noise performance and powerful control algorithms deliver enhanced measurement accuracy and reproducibility for optimal gas chemistry control.
The SLA7900 Series has been the workhorse of the industry for several years. Both the GF Series and the SLA7900 Series feature an all-metal flow path, electropolished to better than five micro-inch Ra. For customers who do not require an electropolished flow path, the all-metal SLA7800 Series is the ideal choiceAdditional features include:
- New Coplanar Valve offers improved performance to deliver fast, accurate and reliable response across a wide and varying range of differential pressures
- Proprietary valve control algorithm enhances response time
- High leak integrity, UHP, and metal seal options ensure clean flow paths for contamination sensitive processes
- Available with traditional analog or digital I/O
Products
Digital, Metal-Sealed Thermal Mass Flow Meter/Controller, 1-1/8” Platform, UHP
The Brooks GF Series is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership. Standard Features include:- High purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge
- Surface passivated high purity wetted flow path
- 10 μ inch Ra surface finish
- Independent service and diagnostic port for on-tool troubleshooting and process fingerprinting and optimization
- Integrated high visibility LCD display reports flow (%) and temperature (°C)
- Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™ communication interfaces
- Gas and range user configurable
- Multi gas/multi range model created and proven using actual process gases to ensure real world accuracy
- Change full scale flow range up to 3:1 for optimum process and inventory management flexibility
- Select from hundreds of gases and gas mixtures
Digital, Metal-Sealed Thermal Mass Flow Meter/Controller, 1-1/8” Platform, UHP
Brooks Model SLA7900 Series UHP digital thermal mass flow measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SL7900 Series combines superior accuracy of the TruCal process gas calibration system with Brooks’ proprietary control algorithm. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.Digital, Metal-Sealed Thermal Mass Flow Meter/Controller, 1-1/8” Platform, Metal Seals
Brooks Model SLA7800 Series metal sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SL7800 Series combines superior accuracy of the TruCal process gas calibration system with Brooks’ proprietary control algorithm. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.Specifications
Compact Digital Thermal Mass Flow
| Max Pressure | Max Temp | ||||||||
| Model | Type | Full Scale Capacity | Accuracy | bar | psig | C | F | Input/Output | |
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UHP Metal Seal Mass Flow Controller | 3 sccm - 30 slm | 5%-35% = ±0.35% Full Scale 35%-100% = ±1.0% Set Point |
10 |
125 | 50 | 122 | D/A or DeviceNet™ | |
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UHP Metal Seal Mass Flow Controller | 3 sccm - 30 slm | 5%-35% = ±0.35% Full Scale 35%-100% = ±1.0% Set Point |
10 | 125 | 50 | 122 | D/A or DeviceNet™ | |
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UHP Metal Seal Mass Flow Controller | 3 sccm - 30 slm | 5%-35% = ±0.35% Full Scale 35%-100% = ±1.0% Set Point |
10 | 125 | 50 | 122 | D/A or DeviceNet™ | |
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 SLA7900 Series |
UHP Metal Seal Meter/Controller | 3 sccm - 50 slpm | 1% Rate | 100 | 1500 | 65 | 150 | 0-5 Vdc, 4-20 mA DeviceNet™ RS-485 | |
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SLA7800 Series |
Metal Seal Mass Flow Meter/Controller | 3 sccm - 50 slpm | 1% Rate | 100 | 1500 | 65 | 150 | 0-5 Vdc, 4-20 mA, DeviceNet™ RS-485 | |
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