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Quantim® Series Coriolis Mass Flow Controllers & Meters

The industry standard for low-flow Coriolis measurement and control.
Models QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4

Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. Brooks has taken the lead in driving improvements in Coriolis flow technology: Our patented Coriolis sensor design measures low flows independent of fluid type or process variables. The result: unsurpassed performance - the most accurate, stable, repeatable and reproducible mass flow measurement and control, even under changing conditions.

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

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Features

  • True mass flow measurement
  • Accurate density measurement
  • 100% of fluid flows through low-mass sensor tube (no bypass)
  • Proprietary optical sensing technique enables accuracy at extreme low flows
  • Measures both liquids and gases over a wide flow range
  • Coplanar valve delivers super-fast response times
  • Smallest, lowest-flow Coriolis meter and controller available on the market
  • Measures and outputs two of four parameters: mass flow, volumetric flow, temperature, density
  • Independent diagnostic/service port and user display
  • Variety of material options, enclosure types and area classifications available

Benefits

  • Advanced sensor and tube technology enable accuracy at extreme low flows
  • Process chemistry and/or process conditions can be altered without the need to change or recalibrate the measurement system
  • Multivariable outputs improve and simplify process monitoring and diagnostics, increasing yields and reducing cost of ownership
  • Integrated sensor, valve and PID control in one package simplifies purchase, installation and startup
  • Reaches set point in <2 seconds reducing wasted material
  • Compact size enables easy integration into intricate process systems
  • No internal moving parts minimizes maintenance

Applications

  • Vacuum processes
  • Catalyst research
  • Liquid precursor delivery to vaporizers
  • Precision coating
  • High accuracy filling stations
  • Metering pump feedback/control loop
Product Type
Mass Flow Controller
Differentiator

Large installed base with proven long term performance

Performance
Repeatability
±0.05% or ±[0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
Response Time

SS Controller: <2 sec

SS Meter: <0.5 sec

Alloy C-22 Controller: <12 sec

Alloy C-22 Meter: <0.5 sec

Flow Range (Full Scale Capacity)
.06 sccm - 30,000 sccm
Temperature Accuracy
± 0.5°C
Accuracy

Standard Flow Accuracy (below) or [(zero stability/flow rate) x 100]% of rate, whichever is greater

Liquid: 0.2% of rate

Gas: 0.5% of rate

Differential Pressure Range

Liquid: 10 - 200 psi

Gas: 10 - 150 psi

Density Range
0 to 0.3 and 0.5 to 2.0 g/cc
Density Accuracy
± 0.005 g/cc
Leak Integrity

Elastomer: Outboard 1 x 10-9 atm. cc/sec, helium (max)

Metal Seal: 1 x 10-10 atm. cc/sec, helium (max)

Mechanical
Wetted Materials

316L, 316L VAR, High Alloy Ferritic Stainless & 17-7PH

Optional: Alloy C-22 Sensor Tube

Housing

Standard: IP40

Optional: IP66

Optional: IP66XP

Inlet Filter

Size 2 Sensor: 1 & 10 micron

Size 3 & 4 Sensors: 10, 20, 30 & 40 micron

Fittings
1/16”, 1/8”, 1/4” or 6mm tube compression, VCR, VCO or NPT(F), 3.2 mm UPG, Downport ANSI/ISA 76.00.02 (See Model Code)
Electrical
Analog Communication

0-5 Vdc, 4-20 mA

Digital Communication
HART
Seal Material
Metal
Ratings
Max Temperature
0 - 65oC
Max Pressure

Standard Internal Valve: 500 psig

Optional Internal Valve: 1500 psig

Optional Remote Valve: 4500 psig

Digital Communication

Electrical Connection

IP40: 15 pin D-Type connector

IP66: Unpluggable Terminal Block 28-16 Awg

IP66XP: 3/4” NPT wiring access to IP40 device with 15 pin D-Type connector

Power Supply / Consumption

Voltage: +14 - 27 Vdc

Nominal Current: 300 - 300 mA (controller); 100 - 150 mA (meter)

Maximum Current: 715 mA @ 14 Vdc (controller); 470 mA @ 14 Vdc (meter)

Maximum Power: 10.0 W (controller); 6.6 W (meter)

Diagnostics
Diagnostic Capability

Available

QMBC2 QMBM2 QMBC3 QMBM3 QMBC4 QMBM4
Product Type Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter
Nominal Flow Range (@ 1 bar drop)
Liquid (kg/hr)

0.15 kg/hr

0.19 kg/hr

0.78 kg/hr

1.00 kg/hr

7.97 kg/hr

13.5 kg/hr

Gas (kg/hr)

0.076 kg/hr

0.103 kg/hr

0.214 kg/hr

0.405 kg/hr

1.796 kg/hr

3.84 kg/hr

Gas (sccm)

1051

 

1432

 

2955

 

5595

 

24787

 

53116

 

Zero Stability

Stainless Steel Sensor (kg/hr)

0.00026

Alloy C-22 Sensor (kg/hr)

0.0004

Stainless Steel Sensor (kg/hr)

0.00026

Alloy C-22 Sensor (kg/hr)

0.0004

Stainless Steel Sensor (kg/hr)

0.0020

Alloy C-22 Sensor (kg/hr)

0.0030

Stainless Steel Sensor (kg/hr)

0.0020

Alloy C-22 Sensor (kg/hr)

0.0030

Stainless Steel Sensor (kg/hr)

0.0120

Alloy C-22 Sensor (kg/hr)

0.0240

Stainless Steel Sensor (kg/hr)

0.0120

Alloy C-22 Sensor (kg/hr)

0.0240

Response Time

Stainless Steel Sensor

<2 secs

Alloy C-22 Sensor

<12 secs

Stainless Steel Sensor

<0.5 secs

Alloy C-22 Sensor

<0.5 secs

Stainless Steel Sensor

<2 secs

Alloy C-22 Sensor

<12 secs

Stainless Steel Sensor

<0.5 secs

Alloy C-22 Sensor

<0.5 secs

Stainless Steel Sensor

<2 secs

Alloy C-22 Sensor

<12 secs

Stainless Steel Sensor

<0.5 secs

Alloy C-22 Sensor

<0.5 secs

FilenameFile TypeDocuments By Language
Data Sheet pdf English Japanese
Installation & Operation Manual pdf English Japanese
Quick Start Guide pdf English Japanese
Supplemental Manual - HART® pdf English Japanese
0254 Series
Controls and powers up to 4 devices