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Pressure & Vacuum Products
Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software
Mass Flow Controllers & Meters
Variable Area Flow Meters (Rotameters)
Ultra-high purity products for the semiconductor industry
Count on the Brooks Factory Certified Service Advantage and our global network of service centers to deliver repairs and instrument calibration to protect and extend the accuracy and performance of your Brooks devices.
Quick access to our RMA portal.
Access our RMA portal with instructions on how to send your device for service, how to track the status, and details on our repair and calibration services.
We have a global network of instrument calibration and repair centers – find the one for you.
Need to learn how to use a Brooks product or support for our software tools? Get details about our training programs.
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