Conventional vapor delivery systems require close temperature and pressure control, do not generate well-controlled vapor mass flow efficiently and face difficulties creating a high-purity vapor for every application.
Brooks Instrument has the solution to these challenges: advanced Direct Liquid Injection (DLI) vaporizer technology. Brooks DLI vaporizer systems employ hot gas, rather than a hot metal surface, to accomplish liquid vaporization. As liquid enters the hot gas chamber, it is atomized by a carrier gas stream. Once the atomized liquid contacts the hot gas, it immediately changes to vapor. The result is chemically pure vapor, free of decomposition byproducts or liquid carryover.
Brooks offers several heat exchanger designs to accommodate an extraordinarily wide range of liquid properties: extremely low vapor pressures (sub 1 Torr), very low flow rates (sub 5 g/h) and very high flow rates (more than 15 kg/hr).
- Water vapor injection / humidification, e.g., fuel cell proton exchange membranes, pharmaceutical drugs
- Silicon dioxide deposition for fiber optic preforms
- Chemical vapor deposition
- Industrial hard coatings
- Fabric polymer infusion
- Microelectronic thin films
- Insulative films
- Dielectric films
- Reflective and anti-reflective glass coatings
Select the vaporizer that best serves your process requirements.