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Mass Flow Controllers & Meters

Mass flow control technology. Unsurpassed process precision.
To truly control any process, you must precisely measure what is happening — in the feedline, in the chamber, at every point — then use that information in real time to keep the process precisely on-target and productive.

As the global leader in precision fluid measurement and control, Brooks Instrument has been innovating thermal mass flow technology for decades, continually launching new products and enhancing existing systems to unlock new levels of thermal mass flow precision, responsiveness, accuracy and repeatability.

Key reasons why our mass flow devices are the most widely used worldwide include:

  • Industry-best range of products to meet widest application needs
  • Innovative MultiFlo™ technology lets one device change gas types and ranges without removing the device from the system and improving actual process gas accuracy
  • Complete product range includes both elastomer sealed and metal sealed options
  • Ultra-high purity devices engineered to satisfy thin film, semiconductor and other high-tech industry requirements

Key Applications

  • Heat treating, cutting and other thermal processes
  • Semiconductor and LED production tools
  • Thin film deposition systems
  • Biopharmaceutical bioreactors
  • Petrochemical and chemical gas and liquid pilot plants
  • Purge gas, process analysis and analytical flow measurement
Brooks GF100 cutaway

GF125, Mass Flow Controller
  • Widest flow and pressure ranges
  • Long-term stability delivers sustained value
  • Includes products approved for hazardous areas
  • Hose down/wash down device enclosures
Fluid Type
Gas
Flow Range (Full Scale Capacity)
3 sccm - 2500 lpm
Accuracy
±0.9% of SP
Max Pressure
4500 psig
Temperature
65oC
Output Type
Analog & Digital
  • For processes sensitive to moisture or oxygen
  • High purity flow path minimizes process contamination, enhances yield
  • Ultra-fast response time

Fluid Type
Gas
Flow Range (Full Scale Capacity)
.06 sccm - 300 slm
Accuracy
±1% of SP
Max Pressure
150 psig
Temperature
50oC
Output Type
Analog & Digital
  • Highest operating temperature
  • High accuracy and repeatability
  • Ultra-high purity construction
Fluid Type
Gas, Vapor
Flow Range (Full Scale Capacity)

3 sccm - 10 slm

Accuracy

±1% of SP

Max Pressure
150 psig
Temperature
150oC
Output Type

Analog & Digital

  • Highest accuracy for very low-flow processes
  • Inherent fluid densometer
  • Devices for both liquid and gas applications

 

 

Fluid Type
Gas, Liquids
Flow Range (Full Scale Capacity)

3 - 27,000 gm/hr

Accuracy
0.2% - 0.5% of rate
Max Pressure
4500 psi
Temperature
65oC
Output Type

Analog & Digital