Brooks Instrument’s wide range of mass flow controllers and mass flow meters assures exactly the right device for your application. Brooks mass flow controllers are the acknowledged industry leader in quality and reliability with many of our devices in operation for over 20 years.
More Info at a Glance:
Thermal Mass Flow
Learn more about Thermal technology.
Coriolis Mass Flow
Quantim Coriolis controllers, meters and sensors provide unsurpassed performance, reliability, repeatability and control in demanding low-flow applications.
Learn more about Coriolis technology.
Obsolete Mass Flow Controller & Flow Meter Support
Read more about our Celerity, Unit, Mykrolis, Millipore, Tylan General and Tylan Obsolete Mass Flow Controller & Flow Meter Support and the recommended Brooks Instrument replacements.
FloMega 5880 and 5890 Series Liquid Flow Controllers are no longer available. Please consider our Quantim Coriolis Mass Flow Controller for accurate low liquid flow measurement. For assistance, please contact our Applications Engineers at 1-888-554-3569.