Vaporization technologies were unable to provide a viable solution for the industry until Brooks Instrument introduced its 2nd generation DLI heat exchanger technology, called DLI High Capacity Vaporizer (DLIHV). The DLIHV system offers one of the highest capacity vaporizers in the industry. The 6000W model consistently and reliably delivers water vapor mass flow rates up to ~5 kg/hr (83 g/min). The atomizer design provides a more favorable liquid-to-gas ratio, reducing the flow rate of carrier gas per mass of liquid precursor.
Our proprietary atomizer exponentially multiplies the specific surface area of an inlet fluid by creating millions of sub-10 micron size droplets through the use of a supersonic shock front caused by the rapid expansion of a carrier gas through an orifice. Increasing the fluid's surface area improves the heat transfer efficiency. The 316L stainless steel atomizer, with removable orifice, is a fully serviceable, interchangeable component sized for the desired fluid and mass flow rate.