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Flanged DLI Vaporizer

Designed for fragile liquids and ideal for R&D.
Models DLIFS

Designed to enable the user to perform their own maintenance and cleaning, the direct liquid inject flange (DLIFS) vaporizer from Brooks Instrument provides indirect vaporization-on-demand for most liquid precursors.

Conventional vaporizers are difficult to start and stop, and often it’s very challenging to determine precisely how much vapor mass is actually being delivered from a conventional vaporizer. Our flanged DLI vaporizers overcome these problems by employing a hot gas, rather than a hot metal surface, to accomplish liquid vaporization. The result is a chemically pure vapor, free of decomposition byproducts or liquid carryover.


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  • Low flow to medium flow, low vapor pressure
  • Heaters: 200-2500 watts
  • Designed for fragile liquids like TEMAHf
  • 316L stainless steel modules fastened together using pefluroelastomer or metal seals
  • Can be disassembled for cleaning and maintenance by user
  • Start-up service from Brooks


  • Highest purity vapor
  • Eliminates liquid carryover
  • Vapor is free of byproducts
  • Wide range of liquid properties
  • Generates perfectly mixed vapors
  • Easy disassembly


  • Research and development
  • Water vaporization for fuel cell stack humidification
  • Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
  • Depositing thin films for enhanced thermal, optical or hardness characteristics such as diamond-like carbon coating and glass coating
  • Vaporizing monomers for vacuum polymer film disposition
  • Generating calibration vapor
  • Vaporizing liquid hydrocarbons
  • Semiconductor thin-films
Product Type

Indirect vaporization-on-demand

High Purity 316L SS construction enables disassembly and cleaning

Vaporization Method
Direct liquid injection with atomization
Fluid Type
Water, hydrocarbons, polymers, metal organics and metal halides
Max Vapor Capacity

Dependent on liquid flow controller

Response Time

Dependent on liquid flow controller


Heater Power
200 - 2250 W
Max Pressure
1500 psig
Max Temperature

Viton seal: 200°C

Kalrez or metal seal: 300°C

Leak Integrity
1 x 10-9 cc/sec (helium)
Differential Pressure Range
(1.2 x Outlet Pressure) + 10 psi
Wetted Materials

SEMI F20 HP/UHP Compliant


Hastelloy C-22

316L Stainless Steel

304 Stainless Steel


Seal Material

Viton® fluoroelastomer,  

Kalrez® perfluoroelastomer

or Nickel


Carrier Gas Inlet: 1/4” or 1/2” tube compression or male VCR

Liquid Inlet: 1/8” or 1/4” tube compression or male VCR

Vapor Outlet: 1/4” or 1/2” male VCR or tube stub

Connection Types
Universal female panel jack (for thermocouples)




Ability to disassemble & clean


Heater Power 200 - 2250 Watts
Fluid Type

DI Water, metal halides & metal organics

Max Pressure 1500 psig
Max Temperature

Viton seals: 200° C

Kalrez or Metal seals: 300° C

FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
0254 Series
Controls and powers up to 4 devices