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Ultra-High Purity Pressure Transducers & Transmitters

Challenge: Improve gas management in ultra-high purity processes

Many fabs have bulk gas sources and cabinets positioned at great distances from the tools they supply. Accurate and controlled delivery of those gases 24/7 is crucial to tool utilization and uptime – so implementing pressure transducers and transmitters that measure, track and communicate pressure levels, and generate alerts when pressures fall out of set points is equally crucial.

Solution: SolidSense II® Pressure Transducers

Brooks SolidSense II® pressure transducers are engineered to handle the complex and sometimes harsh gases used in today’s most cutting-edge semiconductor processes and nodes. They combine weld-free, corrosion-resistant materials along with accuracy within 0.25% of full scale. And by utilizing a unique, one-piece sensor machined from high-quality stainless steel, SolidSense II transducers exhibit excellent long-term stability, regardless of the gas being measured.

PRODUCTS

Seal Free Pressure Series
Seal Free Pressure Series
SolidSense II® Series
SolidSense II® Series
Product Type

Pressure Transmitters (electronic)

Pressure Transducers

Differentiator Single piece design, No seal Ultra-High Purity
Pressure Range

0-60 psi - 0-150 psi*

*150 psi and 145 psi ranges are available only in the Ultrapure Water Models 32 WA and 33 WA.

-15 psi - 3000 psi
Materials of Construction

Process Wetted: High purity perfluoroalkoxy PFA plastic

       Electrical Enclosure: PolypropylenePressure

                            Sensor: AL2O3

Housing: Stainless steel, polymer plastics
Analog Communication 24 Vdc for current output; 12 - 24 Vdc for voltage output 0-5 Vdc, 0-10 Vdc, 0.2-5.2 Vdc, 2-10 Vdc, 4-20 mA



Certifications/Approvals

IP55 Equivalent

Meets CE Standards

Pressure Equipment Directive 97/23/EC as Sound Engineering Standard

EMC: Compliant to EU Directive 2004/108/EC

FM Approved: Non-Incendive for use in Class I, Div II Groups A, B, C and D Hazardous Applications