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Direct Vacuum Measurement

Challenge: Reduce vacuum sensor drift and process tool downtime

For the vast majority of chamber-based fabrication processes, vacuum must be created, measured, and controlled accurately to operate:

  • Cleanly: Pumping a chamber to high vacuum before a process can reduce contamination levels to the PPT (parts per trillion) range.
  • Feasibly: Most thin film coatings — particularly metals — cannot be deposited at atmospheric pressure.
  • Repeatedly: Vacuum permits much better repeatability in thin film processes because contaminants (O2, H2O, H2, etc.) are removed each time the process takes place.
To achieve those results demands exceptionally reliable and repeatable direct vacuum measurement—and process induced sensor contamination resulting in output drift and unstable chamber pressure measurements.

Solution: XacTorr® Series Digital Capacitance Manometers

Brooks Instrument XacTorr® CMX Series digital vacuum capacitance manometers incorporate industry-leading features that improve measurement reliability, virtually eliminate drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer that provides a powerful tool to help ensure that every time you take a process chamber to vacuum, it is contaminant-free to the degree you require.

PRODUCTS

CMC Series
CMC Series
XacTorr Series
XacTorr Series
Product Type Capacitance Manometer Capacitance Manometer
Differentiator

Unheated

Heated or Unheated

Analog or Digital

 

Pressure Range

10, 20, 50, 100, 500 and 1000 Torr Full Scale

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available

Accuracy

Type A = 0.25% of Reading

Type B = 0.50% of Reading

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Temperature Ambient

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

Analog Communication

0-10 Vdc (<10k Ohm load)

0-10 Vdc 5k Ohm load
Digital Communication

DeviceNet™

RS485

Size Compact Large