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4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Ultra-fast response for time-critical flow processes.
Models 4850 / 4860

The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, makes it possible for select 4800 Series controllers to quickly match actual mass flow to any changes in set point. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the devices eliminating the need for remote secondary electronics.

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Features

  • Flow response time (settling time) <0.75 seconds
  • Innovative MEMS sensor and proprietary PID algorithm
  • Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
  • Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
  • Digital capability via RS-232

Benefits

  • Well suited for wide range of common, non-corrosive gases
  • Fast response time ensures rapid steps during process recipe changes
  • Excellent for OEMs: Compact size eases integration into tight machine spaces and speeds installation
  • Optional Local Operator Interface (LOI) is a turnkey solution for local indication, set point control and device configuration; eliminates need for remote secondary electronics
  • Variety of communication options makes it easy to align with user requirements

Applications

  • Heat treating, cutting/welding and other thermal processes
  • Solar/thin film physical vapor deposition (PVD) systems
  • Analytical devices to measure and control reagent, calibration and sample gas flows
Product Type
Mass Flow Controller
Differentiator

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Performance
Flow Range (Full Scale Capacity)
50 sccm - 40 slpm
Gases Supported
Accuracy

3.0% of FS

1.0% of FS (optional)

Repeatability

0.15% FS

Response Time

Normally Closed Valve: 300 ms - <1 sec

Multi-Gas & Range Configurability
Control Range

2-100%

                                        

 

Flow Temperature Coefficient
Ratings
Temperature Range

5-50oC (41-122oF)

Max Pressure

150 psig/10 barg

Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 15-45 psid

7201-55000 sccm = 25-45 psid

*Contact Brooks Technical Support for more information.

Leak Integrity
1x10-10 atm cc/sec He
Mechanical
Seal Material
Elastomer Seal
Wetted Materials

316 Stainless Steel, Hastelloy C-22, 1707 PH,43055

Diagnostics & Display
Diagnostic Capability

Available

Electrical
Analog Communication

0-5 Vdc
4-20 mA

Digital Communication
RS232
Input / Output

0-5 Vdc, 4-20 mA, RS-232 (Standard with all analog I/O options)

Electrical Connection

Compact

Power Supply / Consumption

$$

Optional Equipment
Local Operator Interface
P/N: 273L156ZZZ
Display Area
28mm wide x 11mm high
Max Temperature
50°C
Humidity
5 - 95% RH (ambient)
Electrical Connection

Two 15-pin D-sub connectors

  • One for connection to the 4800 Series
  • One for the remote connection
Power Adaptor
P/N: 641Z059AAA
Power Requirements
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.
Compliance
EMC
EMC Directive 2004/108/EC: per EN 61326:2006
Certifications/Approvals

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

Size

Compact

4850 4860
Product Type

Mass Flow Controller

 

Mass Flow Meter
Flow Range (Full Scale Capacity) 50 sccm - 40 slpm 50 sccm - 40 slpm
Accuracy

3.0% F.S.

1.0% F.S. (optional)

3.0% F.S.

1.0% F.S. (optional)

Repeatability

0.15% F.S.

0.15% F.S.

Response Time

Normally Closed Valve: 300 ms - <1 sec

Normally Closed Valve: 300 ms - <1 sec

Max Pressure 150 psig/10 barg 150 psig/10 barg
Diagnostic Capability

Status Lights: MFC Health, Network Status

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port: RS485 via 2.5 mm jack

Status Lights: MFC Health, Network Status

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port: RS485 via 2.5 mm jack

Analog Communication 0-5 Vdc
4-20 mA
0-5 Vdc
4-20 mA
Digital Communication RS232 RS232
FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
Profibus® Supplemental Manual - 4800 pdf English
RS232 Supplemental Manual - 4800 pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: 4850 - B1 - 2 - STEP

  Meter Series 
   Mechanical Connections 
   Accessories 
  4850    1A - 9/16” -18unf straight thread
   0 - None
     B1 - 1/4” tube compression w/filter
   1 - LOI w/Power Adapter
     C1 - 1/8” tube compression w/filter
   2 - LOI w/o Power Adapter
     D1 - 3/8” tube compression w/filter
 

 

FilenameFile Type
4850-B1-2 STEP
0254 Series
Controls and powers up to 4 devices
Brooks Service Suite (BSS)
A Windows based application providing expanded control of 4800, SLA and SLAMf Revision A Series MFCs and Pressure Controllers and Quantim® MFCs.
4800 Series Software
Monitor flow and perform basic functions.