Brooks Instrument Wins Flow Control Innovation Award for GF Series Mass Flow Controllers
HATFIELD, Pa. (September 30, 2011) – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has won a 2011 Innovation Award from Flow Control magazine. The award recognized Brooks for its
GF Series thermal mass flow controllers, which are highly modular, user-programmable, ultra-high purity devices designed for advanced semiconductor and thin-film processes.
The GF Series builds upon Brooks' expertise in pressure transient insensitive (PTI) technology by minimizing process gas flow variation due to pressure and temperature fluctuations. It has been engineered for long-term reliability with embedded diagnostics and automated zoning to reduce maintenance for a lower cost of ownership.
At the heart of the GF Series is Brooks MultiFlo™, a patented technology developed and refined by Brooks over the last 10 years. A major advancement over traditional single-point gas conversion factors, the GF Series deliver a three-times improvement in accuracy through advanced gas modeling and compensation for non-ideal/non-linear gases. The GF Series also features a full-scale flow rate of 55 slpm for more efficient and reliable performance.
"The GF Series with MultiFlo has changed the mass flow industry by offering customers the ability to select new gas calibrations and full scale ranges without the cost of removing the mass flow controller from the gas line," said Shawn Pewsey, director of field marketing at Brooks Instrument. "We are honored to be recognized by Flow Control's Innovation Awards for our contribution to the semiconductor industry."
A full list of the 2011 Innovation Award winners appears in the
September issue of Flow Control.
About Brooks InstrumentBrooks Instrument, LLC, based in Pennsylvania, is a company of highly trained specialists whose goal is to provide flow solutions that exceed customer expectations. The Company has a proven history of innovation including the first pressure transient insensitive (PTI) mass flow controller, the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series), the first variable area flow meter with Foundation Fieldbus (MT3809 & MT3750), and the first miniaturaized Coriolis mass flow controller (Quantim). Today, Brooks Instrument's portfolio includes glass and metal tube variable area flow meters (rotameters), thermal mass flow controllers and meters, Coriolis mass flow controllers and meters, pressure control products, vacuum capacitance manometers, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit www.BrooksInstrument.com.
