How Low Can You Go? In Pressure That Is.
Designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability, and flexibility. Highlights of the GF100 series industry leading features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and range programmability, optional pressure transient insensitivity (PTI), local display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and valve seat.
GF120XSD is an extension to Brooks GF100 Series thermal mass flow controller family (MFC). Designed for extreme low pressure operation, the GF120XSD has been optimized for the precise delivery of high value, low pressure specialty gases. Read more…
