In industries where precision is everything-like thin film deposition and coatings-even small inconsistencies in gas flow control can mean the difference between perfect product quality and costly rework or downtime. For one thin film deposition systems manufacturer, their flow meter manufacturer couldn't provide technical support which nearly compromised their production line.
Fortunately, Brooks Instrument stepped in – delivering not only the technical support but also the responsiveness and application expertise that rebuilt the manufacturer’s confidence in their equipment.
This is a story of how engineering excellence and deep technical knowledge helped turn frustration into confidence.
The Challenge: Poor Support, Unstable Processes
A manufacturer of thin film deposition systems, specializing in high vacuum process technology and equipment - known for high-precision optical, solar, and aerospace deposition equipment - had been experiencing a slow response on lead times and poor customer service from their current flow meter supplier.
Enter Brooks Instrument: Technical Expertise Meets Engineering Partnership
After a lack of response from the flow meter supplier, the manufacturer scheduled a call with a flow expert from Brooks Instrument. Within days, they were working with a dedicated Brooks Instrument engineer who took a holistic look at their system. The OEM even made a point in mentioning that they had received better customer service from Brooks Instrument compared to their current flow meter supplier.
Here's how Brooks Instrument made a difference:
1. Application-Specific Review
The Brooks Instrument team conducted a complete review of the equipment, including:
- Gas panel design
- Required flow ranges and gases
- Response time and accuracy tolerances
- Integration with existing control systems
They identified multiple mismatches between the prior mass flow controller's capabilities and the OEM's actual system requirements.
2. Transition to SLA5850 Mass Flow Controller with PROFINET and XacTorr® Series Capacitance Manometer
Brooks Instrument recommended the SLA5850 mass flow controller with PROFINET specifically for:
- Long-term sensor stability — critical for minimizing calibration drift
- Wide flow and pressure range
- High accuracy
These controllers also offered improved digital communication, making integration with their control system seamless.
Next, Brooks Instrument recommended a capacitance manometer specifically for:
- Enhanced stability with superior protection from deposition of process gases
- Fast warm-up, precise temperature control, and a rapid response to changes
The Results: Improved Yield, Stability, and Trust
Within weeks of deployment, the OEM's team saw:
- Stable, repeatable gas flow that improved film uniformity
- Reduced rework due to better deposition consistency
- Restored confidence in their thin film deposition system
The difference wasn't just in the equipment. It was the combination of technically superior flow measurement and vacuum control technology and access to decades of real engineering expertise that allowed their team to get back on track - and stay there.
Why It Matters
In advanced manufacturing sectors like thin film deposition, PVD, CVD, and ALD, the margin for error is razor-thin. Mass flow meters and vacuum measurement instrumentation are not just components — they are critical enablers of process stability, repeatability, and product quality.
What this case study shows is that:
- Technical specs alone are not enough. Without responsive support and application understanding, even the best equipment can fall short.
- Brooks Instrument brings both cutting-edge mass flow controller performance and deep engineering support that helps customers solve real problems fast.
- Confidence is built through expertise And it’s exactly that combination that brings engineers back to Brooks Instrument time and time again.
Explore Brooks Instrument Flow and Pressure Control Solutions
If you're facing similar challenges-poor support or a lack of application expertise-it might be time to consider a better solution.
Component datasource missing. Select a datasource for this component.