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产品 质量流量控制器 金属密封 EtherCAT® GF100系列

最快速、最精准的MFC

加强了拥有EtherCAT®的速度
型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

得到报价

EtherCAT® GF100 Series Flyer

针对半导体工艺的完美性能

  • 嵌入式诊断利用实时以太网数据采集能力
  • 超稳定流量传感器（每年≤设定值0.15%的漂移）使低流量更精准，同时减少维修的需求
  • 改进的阀门关闭（≤bin范围的0.15%）减少阀门内漏，从而改善第一片晶圆效应
  • 新增强的抗压力瞬时波动在持续流体传输中降低了串扰流敏感度

特点

  • 每年<满量程的±0.15%的长期零点稳定性
  • 响应稳定时间: 300毫秒 - <1秒
  • 最大流量可达到300 slpm
  • 全金属密封的流体通路：可选5µ 或 10µ inch Ra的表面粗糙度
  • 抗腐蚀的哈氏合金升温传感器在温度升高时改善了测量的重复性
  • MultiFloTM 气体和量程的可编程性—一台表，几千种气体和量程的组合，无需把MFC从管路上拆除，也不会影响精度
  • 方便的用户显示和独立的诊断/服务端口可帮助仪表安装，监测和故障排查
  • GF120 安全传输系统(SDS®)是布鲁克斯最先进的低压降质量流量控制计，用于离子注入和刻蚀工艺的负压安全传输系统的气体传输 

优势

  • 超常的性能
    • 快速反应时间改进应用效率
  • 灵活的拓扑
    • 几乎无限的网络拓扑可能
  • 简单、坚固
    • 配置，诊断以及维护
  • 负担能力
    • 标准的以太网端口

应用

  • 半导体刻蚀设备
  • 薄膜化学气相沉积系统 (CVD, MOCVD, PECVD, ALD)
  • 物理气相沉积 (PVD) 系统
  • 外延工艺系统

{DEBCCA8D-7434-4BA7-B54F-92D4EDC04A75}
产品类型

Mass Flow Controller

{8B89F14C-B912-4424-BCC5-AA95C46D59C6}
区别

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

{FFBE3C7F-0139-4CBE-AF94-74D8A0B30009}
性能
{98B3C086-0985-4066-807F-25A2E7C53EEB}
流量范围-满量程容量

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

{057BC068-8AB8-4BD6-A8B3-CD29145D4DF9}
精度

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

{5B41E208-F4F0-4FC0-9111-CD17A8732770}
重复性
< ±0.15% S.P.
{DD758BDD-DC5E-4D81-B070-C51FEA9BEA18}
响应时间-常闭

Normally Closed Valve: 300 ms - < 1 sec

SDS Gas Delivery: < 3 sec

{2F1BACB2-A180-49D2-B83D-EF895EA85224}
响应时间-常开

Normally Open Valve: <1.5 sec (specific models)

{D301F211-A735-4E4E-B229-495A16152C83}
瞬时压力波动不敏感

Specific models

{B0847CB2-612D-47B5-AF00-D9D3CB8DAD32}
多气体多量程
MultiFlo™ Standard (most models)
{1374FB78-7FB7-4CFF-A118-5F0CAD7B25A1}
控制范围

Standard GF Series:  2-100%

High Flow GF Series: 5-100%

{0C2AFBD5-F1CD-48C0-8FC4-5216C27FF550}
Bin的数量

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

{C7BE52FB-B8E6-44DC-BEFB-DCF0FBE99991}
阀门关闭

Standard GF Series: < 0.15% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

{3F92A104-D508-4775-8D9D-7E7DCE62EDD9}
零点稳定性

< ±0.15% F.S. per year

{60452C9A-BF36-444D-93A6-CCEE2F21D1C1}
温度系数

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

{BCC7C7BB-C17C-4AA7-9ADD-61780C3EE5F4}
机械
{0958A6A9-71D6-4F26-9137-91EDC4625EA5}
密封材料
Metal
{03131EF2-B3E3-48A2-99D2-FA45A35FF3E3}
纯净等级

5 - 10µ inch Ra

{87A68973-BB8F-487E-855A-69FEA4FFFF66}
接液材料

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

{8FC7632B-8368-41BD-826E-B464E8A5E0BC}
阀门

Normally Closed

Normally Open (specific models only)

Meter (no valve)

{94F70132-F545-4627-9AE6-23B21068029A}
等级
{8B312DB0-CCA6-4685-AF36-F91260857AE9}
最大温度
50oC
{80BBEAF4-4D4F-49A0-8C75-7199B4A700A8}
压差范围

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

SDS Models 10 Torr- 30 psid typical

*Typical pressure drops. Contact Brooks Technical Support for more information.

{7A261F9D-32B9-4A05-B2FC-96981C6ED085}
最大压力

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

{6E5FC165-C3A0-43F7-A3A6-65541C20BA4D}
漏率
1x10-10 atm cc/sec He
{FD0F3EAE-7739-4E0D-AEAB-34FA7068CA98}
诊断和显示
{4C717972-2B93-453A-AE05-A480456E8950}
诊断能力
Available

{1EDA9026-203E-4B26-86C4-3BE44F6E9364}
状态灯

Run

Error

Power

Network Status

{AFFD95BD-CF8E-4D68-B535-F99D31B78954}
报警

Control Valve Output

Network Interruption

Temperature High/Low

Pressure High/Low

Power Surge/Sag

{E866E098-05A5-4290-94ED-9267E9BC1068}
诊断/服务端口

Micro USB

{0B05CA40-E0DB-4DFF-915C-FC9D400DDBDF}
显示

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

{2968243A-89B4-47FA-95CF-5CC6A110956B}
电气
{26790E4F-2742-4CEB-BCAD-961628E74B1C}
模拟通讯

—

{8DF0F740-166B-4660-B620-D7997FA6AACE}
数字通讯

EtherCAT®

{53E88974-5783-4CA5-98F3-B802CD91CC8F}
电气连接

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

{AEE200ED-68A0-43B5-B9DC-BD8F1863CA4F}
电源-功耗

24 Vdc, 7 Watts

(Under typical operating conditions)

GF100 GF101 GF120 GF120XSL GF120XSD GF121 GF125 GF126
区别

High Purity

High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate
流量范围-满量程容量 3 sccm - 55 slm

55 slm - 300 slm

 3 sccm - 55 slm 4 - 25 sccm >25 sccm - 1 slm

55 slm - 300 slm

 3 sccm - 55 slm

55 slm - 300 slm
表面抛光 10µ inch Ra 10µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra
精度

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%
重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P.

 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
响应时间-常闭

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms - <700ms

 

Normally Closed

<1 sec

 
响应时间-常开

Normally Open

<1.5 sec

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—
多气体多量程 MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard — — MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
瞬时压力波动不敏感 — — — — — —

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure
诊断能力

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms
数字通讯

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT
Filename File Type Documents By Language
Flyer pdf English
Data Sheet pdf English
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - GF1xx pdf English
0250 读数应用
0250 读数应用
Controls and powers up to 4 devices
MultiFlo™ 配置器
MultiFlo™ 配置器
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.