区别
EtherCAT Communication
High Purity/Ultra-High Purity
Embedded Diagnostics
Ultra-stable Flow Sensor
Improved Valve Shutdown
流量范围-满量程容量
Standard GF Series: 3 sccm - 55 slm
High Flow GF Series: 55 slm - 300 slm
精度
Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%
High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%
响应时间-常闭
Normally Closed Valve: 300 ms - < 1 sec
SDS Gas Delivery: < 3 sec
响应时间-常开
Normally Open Valve: <1.5 sec (specific models)
多气体多量程
MultiFlo™ Standard (most models)
控制范围
Standard GF Series: 2-100%
High Flow GF Series: 5-100%
Bin的数量
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
阀门关闭
Standard GF Series: < 0.15% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
温度系数
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
接液材料
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
阀门
Normally Closed
Normally Open (specific models only)
Meter (no valve)
压差范围
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
SDS Models 10 Torr- 30 psid typical
*Typical pressure drops. Contact Brooks Technical Support for more information.
最大压力
Standard GF Series: up to 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
状态灯
Run
Error
Power
Network Status
报警
Control Valve Output
Network Interruption
Temperature High/Low
Pressure High/Low
Power Surge/Sag
显示
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
电气连接
Power via 5-pin M8 Connector, EtherCAT via twin RJ45
电源-功耗
24 Vdc, 7 Watts
(Under typical operating conditions)