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压力和真空产品
附件和软件 Cables, Filters, Valves, Secondary Electronics, Software
质量流量控制器和仪表
汽化产品
可变面积流量计(转子流量计)
半导体产品 Ultra-high purity products for the semiconductor industry
GF100 系列金属密封质量流量控制器和仪表性能:快速响应和可重现的高纯度/超高纯度过程气体输送。专为半导体、MOCVD 等其他气体流量控制应用设计,GF100 系列在可靠性方面优于半导体行业标准水平,可确保测量结果可重现并且长时间使用后性能依然高度稳定。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求,无需从气路上拆除 MFC 并且不影响精度。
结果:提高工艺灵活性和效率辅以业内最高纯度的过程气体,有助于最大限度提高产率和生产效率。
请与我们的应用工程专家取得联系:
联系电话: + 86-21-38720770 传真
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Mass Flow Controller
High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series
Standard GF Series: 3 sccm - 55 slm
High Flow GF Series: 55 slm - 300 slm
±1% S.P. > 35-100%
±0.35% F.S. 2-35%
±0.5% F.S. (included in accuracy)
Normally Closed Valve: 700 ms - < 1 sec
SDS Gas Delivery: < 3 sec
Normally Open Valve: <1.5 sec (specific models)
Standard GF Series: < 3-100%
High Flow GF Series: 5-100%
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Normally Closed
Normally Open (specific models only)
Meter (no valve)
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.
Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
MFC Health
Network Status
Control Valve Output
Network Interruption
RS-485 via 2.5mm jack (all models)
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
0-5 Vdc
DeviceNet™
RS485 L-Protocol
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
High Purity
High Flow Rate
Ultra-High Purity
Ultra-Fast Response Time
SDS Gas Delivery
55 slm - 300 slm
< ±0.15% S.P.
<1 sec
700 ms
<3 sec
Normally Open
<1.5 sec
—
Status Lights: MFC Health & Network Status
Alarms: Control Valve Output & Network Interruption
RS485 L Protocol
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF100 - AS - G1