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GF100 系列金属密封热质量流量控制器和仪表

高纯度流路。出色的性能、可靠性和可重现性。
型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSL / GF121

GF100 系列金属密封质量流量控制器和仪表性能:快速响应和可重现的高纯度/超高纯度过程气体输送。专为半导体、MOCVD 等其他气体流量控制应用设计,GF100 系列在可靠性方面优于半导体行业标准水平,可确保测量结果可重现并且长时间使用后性能依然高度稳定。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求,无需从气路上拆除 MFC 并且不影响精度。

结果:提高工艺灵活性和效率辅以业内最高纯度的过程气体,有助于最大限度提高产率和生产效率。

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

得到报价

GF100 系列数据表

特点

  • 长期零点稳定性,每年变动小于满量程的 ± 0.5%
  • 稳定时间:700 ms - <1 秒
  • 满量程流速高达 300 slpm
  • 全金属密封流路:可选择采用 4µ 或 10µ 英寸 Ra 表面处理的流路
  • 耐腐蚀 Hastelloy® T-Rise 传感器可提升高温下测量结果的可重现性
  • MultiFlo™ 气体和量程设定功能 — 一台设备即可满足数千种气体类型和各种量程组合的需求,无需从气路上拆除 MFC 并且不影响精度
  • 本地显示屏
  • 可选 SDS 气体输送
  • DeviceNet™、RS-485 L-协议和模拟接口
  • 优势

    • 按照半导体行业标准对高性能组件进行七次连续测试以确保其可靠性
    • 表面积和未吹扫体积更小的全金属耐腐蚀流路可确保流路在吹扫步骤更快干燥
    • MultiFlo™ 技术可在 60 秒内完成新过程气体和/或量程的设定操作 – 不再需要拆除并校准 MFC
    • 高度可配置平台可使大部分品牌的金属密封 MFC 实现插入式更换和升级,适用范围包括早期的 Celerity、Mykrolis、Tylan 和 UNIT 品牌产品
    • GF120 安全输送系统 (SDS®) 是布鲁克斯仪器公司最先进的低压损质量流量控制器,适用于输送注入和势垒层腐蚀过程中使用的次大气压安全输送系统 (SDS) 气体
    • 便捷的用户显示屏和独立的诊断/维护端口有助于设备安装、监测和故障排除

    应用

    • 半导体蚀刻工具
    • 薄膜化学气相沉积系统(CVD、MOCVD、PECVD、ALD)
    • 物理气相沉积 (PVD) 系统
    • 外延工艺系统
    产品类型

    Mass Flow Controller

    区别

    High Purity/Ultra-High Purity

    Standard GF Series

    High Flow GF Series

    性能
    流量范围-满量程容量

    Standard GF Series: 3 sccm - 55 slm

    High Flow GF Series: 55 slm - 300 slm

    精度

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    重复性
    < ±0.15% S.P.
    线性

    ±0.5% F.S. (included in accuracy)

    响应时间-常闭

    Normally Closed Valve: 700 ms - < 1 sec

    SDS Gas Delivery: < 3 sec

    响应时间-常开

    Normally Open Valve: <1.5 sec (specific models)

    多气体多量程
    MultiFlo™ Standard (most models)
    瞬时压力波动不敏感
    控制范围

    Standard GF Series: < 3-100%

    High Flow GF Series: 5-100%

    Bin的数量

    Standard GF Series: 11 bins

    High-Flow GF Series: 4 bins

    阀门关闭

    Standard GF Series: < 1% F.S.

    High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

    零点稳定性
    < ±0.5% F.S. per year
    温度系数

    Span: 0.05% S.P. per °C

    Zero: 0.005% F.S. per °C

    机械
    密封材料
    Metal
    纯净等级
    4 - 10µ inch Ra
    接液材料

    SEMI F20 HP/UHP Compliant

    316L VIM/VAR

    Hastelloy C-22

    316L Stainless Steel

    304 Stainless Steel

    KM-45

    阀门

    Normally Closed

    Normally Open (specific models only)

    Meter (no valve)

    等级
    最大温度
    50oC
    压差范围

    3-860 sccm = 7-45 psid

    861-7200 sccm = 10-45 psid

    7201-55000 sccm = 15-45 psid

    51 slm-300 slm = 30-90 psid

    *Typical pressure drops. Contact Brooks Technical Support for more information.

    最大压力

    Standard GF Series: 500 psia max

    High Flow GF Series: 75 psig (controller), 150 psig (meter)

    漏率
    1x10-10 atm cc/sec He
    诊断和显示
    诊断能力
    Available

    状态灯

    MFC Health

    Network Status

    报警

    Control Valve Output

    Network Interruption

    诊断/服务端口

    RS-485 via 2.5mm jack (all models)

    显示

    Top Mount Integrated LCD

    Viewing Angle: Fixed

    Viewing Distance: 10 feet

    Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

    Resolution: 0.1 (unit)

    电气
    模拟通讯

    0-5 Vdc

    数字通讯

    DeviceNet™

    RS485 L-Protocol

    电气连接

    Analog/RS485 via 9-Pin "D" connector

    DeviceNet™ via 5-Pin "M12" connector

    Various cable adaptors available. See product data sheet for more information.

    电源-功耗

    Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

    DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

    (Under typical operating conditions)

    承诺
    电磁兼容性

    EC Directive 2004/108/EC

    CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

    符合环保要求

    RoHS Directive (2011/65/EU)

    REACH Directive EC 1907/2006

    GF100 GF101 GF120 GF120XSL GF120XSL GF121
    区别

    High Purity

    High Purity

    High Flow Rate

     

    Ultra-High Purity

    Ultra-Fast Response Time

     

    SDS Gas Delivery

    SDS Gas Delivery

    Ultra-High Purity

    High Flow Rate

    流量范围-满量程容量 3 sccm - 55 slm

    55 slm - 300 slm

    3 sccm - 55 slm >25 sccm - 1 slm 4 - 25 sccm

    55 slm - 300 slm

    表面抛光 10µ inch Ra 10µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra 4µ inch Ra
    精度

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    ±1% S.P. > 35-100%

    ±0.35% F.S. 2-35%

    重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

    < ±0.15% S.P.

    < ±0.15% S.P.

    < ±0.15% S.P.
    响应时间-常闭

    Normally Closed

    <1 sec

    Normally Closed

    <1 sec

    Normally Closed

    700 ms

    Normally Closed

    <3 sec

    Normally Closed

    <3 sec

    Normally Closed

    <1 sec

    响应时间-常开

    Normally Open

    <1.5 sec

    Normally Open

    Normally Open

    <1.5 sec

    Normally Open

    Normally Open

    Normally Open

    多气体多量程 MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
    瞬时压力波动不敏感
    诊断能力

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    Status Lights: MFC Health & Network Status

    Alarms: Control Valve Output & Network Interruption

    模拟通讯

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    0-5 Vdc

    数字通讯

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    RS485 L Protocol

    DeviceNet™

     

    FilenameFile TypeDocuments By Language
    Data Sheet - GF100, GF120 pdf English Japanese
    Data Sheet - GF101, GF121 pdf English
    Installation & Operation Manual pdf English
    DeviceNet™ Supplemental Manual - GF100 Series pdf English
    RS485 L-Protocol Supplemental Manual - GF100 Series pdf English
    CE EU Declaration of Conformity Certificate pdf English

    Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

    Example: GF100 - AS - G1

    Meter Series
    Fitting
    Connector
     GF1xx AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50)
    BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base
      CX - 1-1/8” body width, 92 mm C Seal
    *DX - DeviceNet™ 5 pin micro
      VX - 1-1/2” body width, 124mm 1/4” VCR male
    EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base
      WX - 1-1/8” body width, 92mm W Seal
    GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation
        G1 - 9-Pin D with RS485 (Unit”G”)
        SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
    Controls and powers up to 4 devices
    A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.