GF100 系列金属密封热质量流量控制器和仪表

高纯度流路。出色的性能、可靠性和可重现性。

型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSL / GF121 / GF125 / GF126

GF100 系列金属密封质量流量控制器和仪表性能：快速响应和可重现的高纯度/超高纯度过程气体输送。专为半导体、MOCVD 等其他气体流量控制应用设计，GF100 系列在可靠性方面优于半导体行业标准水平，可确保测量结果可重现并且长时间使用后性能依然高度稳定。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求，无需从气路上拆除 MFC 并且不影响精度。

结果：提高工艺灵活性和效率辅以业内最高纯度的过程气体，有助于最大限度提高产率和生产效率。

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

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GF100 系列数据表

特点

长期零点稳定性，每年变动小于满量程的 ± 0.5%
稳定时间：Settling times: 300 ms - <700 ms or 700 ms - <1 second 秒
满量程流速高达 300 slpm
全金属密封流路：可选择采用 4µ 或 10µ 英寸 Ra 表面处理的流路
耐腐蚀 Hastelloy® T-Rise 传感器可提升高温下测量结果的可重现性
MultiFlo™ 气体和量程设定功能 — 一台设备即可满足数千种气体类型和各种量程组合的需求，无需从气路上拆除 MFC 并且不影响精度
本地显示屏
可选 SDS 气体输送
DeviceNet™、RS-485 L-协议和模拟接口

优势

按照半导体行业标准对高性能组件进行七次连续测试以确保其可靠性
表面积和未吹扫体积更小的全金属耐腐蚀流路可确保流路在吹扫步骤更快干燥
MultiFlo™ 技术可在 60 秒内完成新过程气体和/或量程的设定操作 – 不再需要拆除并校准 MFC
高度可配置平台可使大部分品牌的金属密封 MFC 实现插入式更换和升级，适用范围包括早期的 Celerity、Mykrolis、Tylan 和 UNIT 品牌产品
GF120 安全输送系统 (SDS®) 是布鲁克斯仪器公司最先进的低压损质量流量控制器，适用于输送注入和势垒层腐蚀过程中使用的次大气压安全输送系统 (SDS) 气体
便捷的用户显示屏和独立的诊断/维护端口有助于设备安装、监测和故障排除

应用

半导体蚀刻工具
薄膜化学气相沉积系统（CVD、MOCVD、PECVD、ALD）
物理气相沉积 (PVD) 系统
外延工艺系统

产品类型

Mass Flow Controller

区别

High Purity/Ultra-High Purity

Standard GF Series

High Flow GF Series

Ultra-Fast Response Time

Pressure Transient Insensitivity

性能

流量范围-满量程容量

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

精度

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

重复性

< ±0.15% S.P.

线性

±0.5% F.S. (included in accuracy)

响应时间-常闭

Normally Closed Valve:

300 ms - < 700 ms

700 ms - < 1 sec

SDS Gas Delivery: < 3 sec

响应时间-常开

Normally Open Valve: <1.5 sec (specific models)

多气体多量程

MultiFlo™ Standard (most models)

瞬时压力波动不敏感

<5% S.P. for up to 5 psi/sec upstream press. spike

控制范围

Standard GF Series: < 3-100%

High Flow GF Series: 5-100%

Bin的数量

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

阀门关闭

Standard GF Series: < 1% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

零点稳定性

< ±0.5% F.S. per year

温度系数

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

机械

密封材料

Metal

纯净等级

4 - 10µ inch Ra

接液材料

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

阀门

Normally Closed

Normally Open (specific models only)

Meter (no valve)

等级

最大温度

50^oC

压差范围

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

*Typical pressure drops. Contact Brooks Technical Support for more information.

最大压力

Standard GF Series: 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

漏率

1x10^-10 atm cc/sec He

诊断和显示

诊断能力

Available

状态灯

MFC Health

Network Status

报警

Control Valve Output

Network Interruption

诊断/服务端口

RS-485 via 2.5mm jack (all models)

显示

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

电气

模拟通讯

0-5 Vdc

数字通讯

DeviceNet™

RS485 L-Protocol

电气连接

Analog/RS485 via 9-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Various cable adaptors available. See product data sheet for more information.

电源-功耗

Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

(Under typical operating conditions)

承诺

电磁兼容性

EC Directive 2004/108/EC

CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

符合环保要求

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

	GF100	GF101	GF120	GF120XSL	GF120XSL	GF121	GF125	GF126
区别	High Purity	High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Time	SDS Gas Delivery	SDS Gas Delivery	Ultra-High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity	Ultra-High Purity High Flow Rate Pressure Transient Insensitivity
流量范围-满量程容量	3 sccm - 55 slm	55 slm - 300 slm	3 sccm - 55 slm	>25 sccm - 1 slm	4 - 25 sccm	55 slm - 300 slm	3 sccm - 55 slm	55 slm - 300 slm
表面抛光	10µ inch Ra	10µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra
精度	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
重复性	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.
响应时间-常闭	Normally Closed <1 sec	Normally Closed <1 sec	Normally Closed 700 ms	Normally Closed <3 sec	Normally Closed <3 sec	Normally Closed <1 sec	Normally Closed Valve 300ms (3-860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)	Normally Closed Valve <1 sec
响应时间-常开	Normally Open <1.5 sec	Normally Open —	Normally Open <1.5 sec	Normally Open —	Normally Open —	Normally Open —	Normally Open Valve <1.5 sec	Normally Open Valve —
多气体多量程	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard	—	—	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard
瞬时压力波动不敏感	—	—	—	—	—	—	±5% S.P. up to 5 psi/sec upstream press. spike	Ability to measure inlet pressure
诊断能力	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights - MFC Health, Network Status Alarms - Control Valve Output, Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption
模拟通讯	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc
数字通讯	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™

文件名	文件类型	文档语言
Data Sheet - GF100, GF120, GF125	pdf	English
Data Sheet - GF101, GF121, GF126	pdf	English
Installation & Operation Manual	pdf	English
DeviceNet™ Supplemental Manual - GF100 Series	pdf	English
RS485 L-Protocol Supplemental Manual - GF100 Series	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF100 - AS - G1

Meter Series	Fitting	Connector
GF1xx	AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50)	BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base
	CX - 1-1/8” body width, 92 mm C Seal	*DX - DeviceNet™ 5 pin micro
	VX - 1-1/2” body width, 124mm 1/4” VCR male	EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base
	WX - 1-1/8” body width, 92mm W Seal	GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation
		G1 - 9-Pin D with RS485 (Unit”G”)
		SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)

文件名	文件类型
GF100-GF120-GF125-AS-G1	STEP
GF100-GF120-GF125-AS-SX	DXF
GF100-GF120-GF125-AS-SX	IGS
GF100-GF120-GF125-AS-SX	STEP
GF100-GF120-GF125-AX-DX	DXF
GF100-GF120-GF125-AX-DX	IGS
GF100-GF120-GF125-AX-DX	STEP
GF100-GF120-GF125-AX-G1	IGS
GF100-GF120-GF125-AX-G1	STEP
GF100-GF120-GF125-CX-DX	STEP
GF100-GF120-GF125-CX-GX	DXF
GF100-GF120-GF125-CX-GX	IGS
GF100-GF120-GF125-CX-GX	STEP
GF100-GF120-GF125-CX-SX	DXF
GF100-GF120-GF125-CX-SX	STEP
GF100-GF120-GF125-CX-TX	DXF
GF100-GF120-GF125-CX-TX	IGS
GF100-GF120-GF125-CX-TX	STEP
GF100-GF120-GF125-DX-DX	DXF
GF100-GF120-GF125-DX-DX	IGS
GF100-GF120-GF125-DX-DX	STEP
GF100-GF120-GF125-DX-TX	DXF
GF100-GF120-GF125-DX-TX	IGS
GF100-GF120-GF125-DX-TX	STEP
GF100-GF120-GF125-EX-SX	DXF
GF100-GF120-GF125-EX-SX	IGS
GF100-GF120-GF125-EX-SX	DXF
GF100-GF120-GF125-LX-DX	DXF
GF100-GF120-GF125-LX-DX	IGS
GF100-GF120-GF125-LX-DX	STEP
GF100-GF120-GF125-LX-GX	DXF
GF100-GF120-GF125-LX-GX	IGS
GF100-GF120-GF125-LX-GX	STEP
GF100-GF120-GF125-VS-E0	DXF
GF100-GF120-GF125-VS-E0	IGS
GF100-GF120-GF125-VS-E0	STEP
GF100-GF120-GF125-VS-G1	DXF
GF100-GF120-GF125-VS-G1	IGS
GF100-GF120-GF125-VS-G1	STEP
GF100-GF120-GF125-VS-GX	DXF
GF100-GF120-GF125-VS-GX	IGS
GF100-GF120-GF125-VS-GX	STEP
GF100-GF120-GF125-VS-SX	DXF
GF100-GF120-GF125-VS-SX	IGS
GF100-GF120-GF125-VS-SX	STEP
GF100-GF120-GF125-VS-TX	DXF
GF100-GF120-GF125-VS-TX	IGS
GF100-GF120-GF125-VS-TX	STEP
GF100-GF120-GF125-VX-BX	STEP
GF100-GF120-GF125-VX-DX	STEP
GF100-GF120-GF125-VX-E0	DXF
GF100-GF120-GF125-VX-E0	IGS
GF100-GF120-GF125-VX-E0	STEP
GF100-GF120-GF125-VX-EX	STEP
GF100-GF120-GF125-VX-G1	dxf
GF100-GF120-GF125-VX-G1-STEP	STEP
GF100-GF120-GF125-VX-GX-STEP	STEP
GF100-GF120-GF125-VX-KX	DXF
GF100-GF120-GF125-VX-KX	IGS
GF100-GF120-GF125-VX-KX	STEP
GF100-GF120-GF125-VX-SX	DXF
GF100-GF120-GF125-VX-SX-STEP	STEP
GF100-GF120-GF125-WX-DX	DXF
GF100-GF120-GF125-WX-DX	IGS
GF100-GF120-GF125-WX-DX	STEP
GF100-GF120-GF125-WX-GX-STEP	STEP
GF100-GF120-GF-125-WX-SX	DXF
GF100-GF120-GF-125-WX-SX	IGS
GF100-GF120-GF-125-WX-SX	STEP
GF101-GF-121-GF126-C1-DX	DXF
GF101-GF-121-GF126-C1-DX	IGS
GF101-GF-121-GF126-C1-DX	STEP
GF101-GF121-GF126-V1-D0	DXF
GF101-GF121-GF126-V1-D0	IGS
GF101-GF121-GF126-V1-D0	STEP
GF101-GF121-GF126-V1-DX	DXF
GF101-GF121-GF126-V1-DX	IGS
GF101-GF121-GF126-V1-DX	STEP
GF101-GF-121-GF126-V1-EX	DXF
GF101-GF-121-GF126-V1-EX	IGS
GF101-GF-121-GF126-V1-EX	STEP
GF101-GF121-GF126-V1-G1	DXF
GF101-GF121-GF126-V1-G1	IGS
GF101-GF121-GF126-V1-G1	STEP
GF101-GF121-GF126-V2-DX	STEP
GF101-GF121-GF126-V2-G1	DXF
GF101-GF121-GF126-V2-G1	IGS
GF101-GF121-GF126-V2-G1	STEP
GF101-GF121-GF126-V2-SX	DXF
GF101-GF121-GF126-V2-SX	IGS
GF101-GF121-GF126-V2-SX	STEP

0250 读数应用

Controls and powers up to 4 devices

MultiFlo™ 配置器

A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.

GF100 系列金属密封热质量流量控制器和仪表

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