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产品快速查找 Find a model number or product name
压力和真空产品
附件和软件 Cables, Filters, Valves, Secondary Electronics, Software
质量流量控制器和仪表
汽化产品
可变面积流量计(转子流量计)
半导体产品 Ultra-high purity products for the semiconductor industry
5850EM 系列金属密封热质量流量控制器的性能基于广泛使用的 5850E 和 i 系列 MFC,可在高洁净环境下测量和控制高压气体流量并具有经验证的稳定性。该产品的金属密封结构和电镀抛光接液表面可确保出色的流量完整性并有助于整体提升过程效率,这得益于设备无需对气体压力进行连续监测和重新调节即可保证流量稳定。
请与我们的应用工程专家取得联系:
联系电话: + 86-21-38720770 传真
得到报价
Large installed base with proven long term performance
1% F.S. incl. linearity
1.5% F.S. incl. linearity >20 slpm
0.2% of rate
±0.5% F.S. (included in accuracy)
Normally Closed Valve: <3 sec
Optional: 600 msec
—
2-3% - 100%
N/A
316L VAR, 316L, and high alloy ferritic stainless steel
Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®
Normally Closed, Normally Open
Meter (no valve)
5 - 50 psi (gas and range dependent)
1500 psi
Control Valve Output, Network Interruption
4-20 mA
0-5 Vdc
15 Pin D Connector (DA-15P)
Normally Closed valve: 3.25 watts
Normally Open valve: 10.5 watts
(89/336/EEC) per 61326
.06 sccm - 30,000 sccm
5 Ra internal finish (optional)
Electropolished wetted surfaces (optional)
Enhanced process (5 Ra avg.) internal surface finish(optional)
High purity VAR 316L Stainless Steel
1% F.S. including linearity
1.5% F.S. including linearity (>20 slpm)
1 % F.S. including linearity
0.25% Rate
0.2% Rate
Normally Closed Valve
<3 sec
.008% per psi Nitrogen
0.03% per psi up to 150 psig
MFC Health, Network Status
Profibus
RS485 S-Protocol
RS485 L-Protocol
DeviceNet™