機種
Pressure Controller & Flow Meter
特長
Control Mode: Downstream or Upstream
Remote Transducer
Wide Flow & Pressure Range
流量範囲（フルスケール容量）
Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.
精度
±1% of rate 20-100% F.S.
±0.2% F.S. < 20% F.S.
Temperature Coefficient
Zero: Less than 0.035% FS per °C
Span: Less than 0.1% of Rate per °C
圧力レンジ
Dependent upon remote pressure transducer, maximum 500 psig.
Response Time - NC
< 1 sec typical for a 20-100% setpoint step with max 2% overshoot.
Actual pressure response depends on system design.
Temperature Range - Ambient
Operating: 0°C to 60°C
Non-Operating: -25°C to 100°C
Fluid: 0°C to 65°C
Leak Integrity
Inboard to Outboard
1 x 10-10 atm scc/sec Helium max
Wetted Materials
316L Vacuum Arc Remelt (VAR)
316L
High-Alloy Ferritic Stainless Steel
External/Internal Seals: Nickel
Valve Seat: 316L Stainless Steel - standard
Electrical Connection
Analog via 15-Pin "D" Connector
DeviceNet™ via 5-Pin "M12" Connector
Power Supply - Consumption
Analog: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored)
DeviceNet™: 11 - 25 Vdc