SLA7840 メタルシールプレッシャーコントローラ/フローメータ

Pressure Controller & Flow Meter

Control Mode: Downstream or Upstream

Remote Transducer

Wide Flow & Pressure Range

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

±1% of rate 20-100% F.S.

±0.2% F.S. < 20% F.S.

±0.2% of rate

Zero: Less than 0.035% FS per °C

Span: Less than 0.1% of Rate per °C

20:1

< 1 sec typical for a 20-100% setpoint step with max 2% overshoot.

Actual pressure response depends on system design.

Operating: 0°C to 60°C

Non-Operating: -25°C to 100°C

Fluid: 0°C to 65°C

Inboard to Outboard

1 x 10^-10 atm scc/sec Helium max

32 µ inch Ra

316L Vacuum Arc Remelt (VAR)

316L

High-Alloy Ferritic Stainless Steel

External/Internal Seals: Nickel

Valve Seat: 316L Stainless Steel - standard

Normally Closed

0 - 5 Vdc

Analog via 15-Pin "D" Connector

DeviceNet™ via 5-Pin "M12" Connector

Analog: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored)

DeviceNet™: 11 - 25 Vdc