流量範囲（フルスケール容量）
3 sccm - 300 slm
精度
±1% S.P. 35-100%
±0.35% F.S. < 5-35%
Repeatability
< ±0.2% S.P.
Linearity
±0.5% F.S. (included in accuracy)
Response Time - NC
Normally Closed Valve: <1 sec
Multi-Gas Multi-Range
MultiFlo™ Available
Number of Bins
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
Valve Shut Down
Standard GF Series: < 1% F.S.
High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.
Zero Stability
< ±0.5% F.S. per year
Level of Purity
16µ inch Ra
Wetted Materials
316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45
Valves
Normally Closed
Meter (no valve)
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops)
最大圧力
Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Leak Integrity
1x10-10 atm cc/sec He
Status Lights
MFC Health, Network Status
Alarms
Control Valve Output, Network Interruption
Diagnostic - Service Port
RS485 via 2.5mm jack (all models)
Analog Communication
0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc
デジタル通信
DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)
Electrical Connection
Profibus/Analog via 9-Pin "D" connector
RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Power Supply - Consumption
Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max
High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
電磁環境適合性
CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)