特長
EtherCAT Communication
High Purity/Ultra-High Purity
Embedded Diagnostics
Ultra-stable Flow Sensor
Improved Valve Shutdown
流量範囲（フルスケール容量）
Standard GF Series: 3 sccm - 55 slm
High Flow GF Series: 55 slm - 300 slm
精度
Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%
High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%
Repeatability
< ±0.15% S.P.
Response Time - NC
Normally Closed Valve: 300 ms - < 1 sec
SDS Gas Delivery: < 3 sec
Response Time - NO
Normally Open Valve: <1.5 sec (specific models)
Multi-Gas Multi-Range
MultiFlo™ Standard (most models)
Control Range
Standard GF Series: 2-100%
High Flow GF Series: 5-100%
Number of Bins
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
Valve Shut Down
Standard GF Series: < 0.15% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Temperature Coefficient
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Wetted Materials
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Valves
Normally Closed
Normally Open (specific models only)
Meter (no valve)
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
SDS Models 10 Torr- 30 psid typical
*Typical pressure drops. Contact Brooks Technical Support for more information.
最大圧力
Standard GF Series: up to 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity
1x10-10 atm cc/sec He
Status Lights
Run
Error
Power
Network Status
Alarms
Control Valve Output
Network Interruption
Temperature High/Low
Pressure High/Low
Power Surge/Sag
Diagnostic - Service Port
Display
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
Electrical Connection
Power via 5-pin M8 Connector, EtherCAT via twin RJ45
Power Supply - Consumption
24 Vdc, 7 Watts
(Under typical operating conditions)