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GF135 シリーズソフトウェア


The GF135 Series commissioning software is a Windows-based application from Brooks Instrument that provides users with a simple means to create a performance baseline during initial installation of the MFC.  The performance baseline file is stored on the GF135 and is used in conjunction with the integrated rate-of-decay (ROD) secondary flow verification measurement to provide the user with unique “percentage change in flow rate” diagnostic data. The % change in flow rate data provides equipment and process engineers with real-time data to support predictive maintenance, improved process uptime, chamber matching and yield enhancement initiatives.

To access this software you must have Windows 7 (32 or 64 bit). If your computer meets this system requirement, please download the software and follow the instructions on the install wizard.

If you have any questions, please contact Technical Services or your local Brooks Instrument representative for assistance.


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