{DD80F177-0644-4E6F-A6F7-8BEE8CCC8148}
製品タイプ
Mass Flow Controller
{342B34FB-8F48-455C-9369-AC80592A5613}
差別化要因
Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases
{AE58DF55-0E8B-480D-8332-15420C054361}
{C496FBC9-FE7D-4482-86F7-2A8FCADFFCE9}
流量範囲（フルスケール容量）
50 sccm - 40 slpm
{74428B21-3F12-4974-BA4B-E2A60F8E8343}
精度
3.0% of FS
1.0% of FS (optional)
{9B06DC17-7D52-45A5-8B9E-B205ECF3CE14}
{7139AB7A-C0FC-4046-97E7-B07D9BB07CA2}
レスポンスタイム
Normally Closed Valve: 300 ms - <1 sec
{8EAD680B-0B27-4967-ACC4-ABD4795DBF0B}
{9C158444-AA60-4088-8BBA-420D8B70AF5D}
{B0E07062-42F4-4A32-B95B-9E8300E34C8B}
{C2D9ACE3-07AF-4DCD-91DD-6ADDA573C621}
{026A3548-CA3B-4EE4-8AE4-AFF07B531CC1}
{7B76E9C7-827A-4AC5-A867-B0A86391D729}
{0775DDBE-8D9C-407D-B045-1E7390E8F961}
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
{9F7B84C0-6CCE-401E-B020-309EE5B3462F}
Leak Integrity
1x10-10 atm cc/sec He
{F467533C-C8EA-471A-B189-4FBAFA210AA5}
{BC7545EE-BFD0-4D3F-988E-90C2B5DCD668}
{B4F8528F-91B9-455E-A539-BE8E49C74F3A}
Wetted Materials
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
{CF205FFF-4E15-4866-AEA6-F9267ABD04DD}
{E8543896-D4FA-454F-8B5B-82A8715652F4}
{F9182909-0674-4E06-973E-AE74464C3FD8}
{FB651871-1123-4252-80CE-A7524FEDC91E}
{D195B0C8-F078-4F56-845D-2C555107083E}
{5FCA2484-848D-4854-AE09-458FE5FDCE35}
Input and Output
0-5 Vdc,
4-20 mA, RS-232 (Standard with all analog I/O options)
{12602118-7820-4B37-8991-AF33F6965792}
Electrical Connection
Two 15-pin D-sub connectors
- One for connection to the 4800 Series
- One for the remote connection
{0DFB118D-8C54-4AB7-A90C-6533AEFCDB8B}
Power Supply - Consumption
{D4333BAF-4CB8-42C2-BE90-3CA3619EF5F5}
{36A8037C-83FF-4514-9691-78E2A9798EAC}
Local Operator Interface
P/N: 273L156ZZZ
{D5A49C8D-CAA9-4F77-8EE2-8A4BD7D9CB6D}
Display Area
28mm wide x 11mm high
{6D1C636F-A70B-4BCF-8F88-07969B26FD11}
{DBD00202-21B3-4F02-886E-199125EC4F42}
Humidity
5 - 95% RH (ambient)
{123B2617-DE2F-472A-B307-283D82137210}
Power Adaptor
P/N: 641Z059AAA
{A36B2180-971A-49AE-B7BD-ACDA212744A1}
Power Requirements
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.
{31E06B21-AF1D-400B-B44B-BEF157935087}
{A6C4D113-2BBE-4FB9-95A7-9119A0661825}
電磁環境適合性
EMC Directive 2004/108/EC: per EN 61326:2006
{64B8D796-839F-4AFC-A6A2-48CFD7B79CC9}
認定 / 承認
ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)
{8927F383-02A0-4C8F-8BDA-32D608CE783C}
環境法令遵守
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
{2EECB1C7-4F8E-4A31-B814-E4DE170F3296}