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Serie 9861
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Serie GF100
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Modell GF100 EtherCAT
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Serie GF125
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Gerätetyp
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Mass Flow Controller
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Massedurchflussregler
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Massedurchflussregler
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Massedurchflussregler
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Unterscheidungsmerkmal
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Highest Flow Accuracy Highest Operating Temperature Digital Communication
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High Purity/Ultra-High Purity Standard GF Series High Flow GF Series
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EtherCAT Communication
High Purity/Ultra-High Purity
Embedded Diagnostics
Ultra-stable Flow Sensor
Improved Valve Shutdown
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Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity
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Dichtungsmaterial
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Metal
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Metal
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Metal
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Metal
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Reinheitsgrad
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4 μ inch Ra
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4 - 10µ inch Ra
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5 - 10µ inch Ra
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4 - 5µ inch Ra
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Durchflussbereich (Maximalwert)
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10 slm (N2 equivalent)
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Standard GF Series: 3 sccm - 55 slm High Flow GF Series: 55 slm - 300 slm
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Standard GF Series: 3 sccm - 55 slm
High Flow GF Series: 55 slm - 300 slm
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3 sccm - 300 slm
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Genauigkeit
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1% of SP@ 35 - 100% FS 0.35% of FS @ <35% FS
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±1% S.P. > 35-100% ±0.35% F.S. 2-35%
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Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%
High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%
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±1% S.P. > 35-100% ±0.35% F. S. 2-35%
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Maximaler Druck
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620 kPa (90 psi)
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Standard GF Series: 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter)
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Standard GF Series: up to 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
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Standard GF Series: 100 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter)
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Maximale Temperatur
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150oC
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50oC
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50oC
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50oC
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Analoge Kommunikation
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0-5 Vdc
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0-5 Vdc
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—
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0-5 Vdc
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Digitale Kommunikation
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RS485 L-Protocol (via dual RJ11 ports)
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DeviceNet™ RS485 L-Protocol
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EtherCAT®
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DeviceNet™ RS485 L-Protocol
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