橡胶密封热式质量流量计和控制器
布鲁克斯仪器的橡胶密封质量流量计和控制器将工艺所需的准确性、可靠性和可重复性相结合,是一种能够为您提供高精度性能和长期稳定性并且经济有效的测量仪器。结果:使运营投资价值和回报最大化。
关键应用
- 化学品与石化分析和试验过程
- 实验室和分析系统
- 生命科学实验室
- 薄膜气相沉积
- 热处理、切割等其他热过程
- 真空应用
选择最适合自身工艺需求的质量流量设备。
产品
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产品类型 | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Meter |
区别 |
Wide Flow & Pressure Range Superior Long-term Stability High Accuracy
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High Accuracy MultiFlo™ Capability Compact Size Suitable for Full Suite of Gases |
Proven Reliable Performance Long Term Stability Easy to Change Range and Recalibrate in the Field |
IP66 Approved Enclosure Perfect for Hose Down/Wash Down Applications Hazardous Area Approvals
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Economical Ideal Upgrade from Volumetric Devices |
流量范围-满量程容量 | .003 - 2500 slpm | 3 sccm - 50 slpm |
0 - 1000 slpm |
.003 - 2500 slpm |
0 - 50 slpm |
密封材料 | Elastomer Seal | Elastomer Seal | Elastomer Seal | Elastomer Seal |
Stainless Steel |
最大压力 |
.003-200 slpm: 1500 psi/103 bar 100 - 2500 slpm: 1000 psi/70 bar Optional 4500 psi/310 bar on 50 slpm max device |
150 psig/10 bar |
Controllers: 1500 psig Meters: up to 4500 psig on some models |
Up to 100 lpm: 1500 psi/100 bar Up to 50 lpm: 4500psi/310 bar (optional) 100-2500 lpm: 1000 psi/70 bar |
150 psig |
精度 |
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69) ±0.6% of SP (20-100% FS) ±0.12% of FS (<20% FS) 1100 slpm up to 2500 slpm: ±0.6% of FS Standard Devices (includes uncertainty from reference standards ±0.9% of SP (20-100% FS) ±0.18% of FS (2-20% FS) 1100 slpm up to 2500 slpm: ±1.0% of FS |
1% of SP 35-100%, 0.35% of FS 2-35% |
1% of FS 1.5% of FS > 20 slpm |
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69) ±0.6% of SP (20-100% FS) ±0.12% of FS (<20% FS) 1100 slpm up to 2500 slpm: ±0.6% of FS Standard Devices (includes uncertainty from reference standards ±0.9% of SP (20-100% FS) ±0.18% of FS (2-20% FS) 1100 slpm up to 2500 slpm: ±1.0% of FS |
5% of FS including linearity |
重复性 |
0.20% SP |
0.20% SP |
0.25% of Rate |
0.20% SP |
0.50% FS |
多气体多量程 |
Standard |
MultiFlo™ Available |
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Standard |
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诊断能力 |
Available
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Available |
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Available
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模拟通讯 |
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
0-5 V, 0-10 V |
0-5 Vdc |
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
0-5 V into 1000 ohms or greater |
数字通讯 |
DeviceNet™ EtherCAT® EtherNet/IP™ Profibus® PROFINET RS-485 |
DeviceNetTM
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DeviceNet™ EtherNet/IP™ Profibus® PROFINET RS-485 |
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大小 | Medium | Compact | — | Large |
Compact |
认证和批准 |
ISO/IEC 17025:2005 UL (Recognized): ATEX: II 3 G Ex nA IIC T4 Gc IECEx: II 3 G Ex nA IIC T4 Gc KOSHA: Ex nA IIC T4
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CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) Safety EN61010-1
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ISO/IEC 17025:2005 CE: EMC, RoHs, PED
UL Listed/Recognized:
Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22
ATEX:
II 3 G Ex nA IIC T4 Gc
II 3 D Ex tc IIIC T 85°C Dc
IECEx:
Ex nA IIC T4 Gc
Ex tc IIIC T 85°C Dc
KOSHA: Ex nA IIC T4 Ex tc IIIC T85°C Dc |
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