橡胶密封热式质量流量计和控制器

经验证具有极高灵活性，能够满足各种质量流量测量需求。

布鲁克斯仪器的橡胶密封质量流量计和控制器将工艺所需的准确性、可靠性和可重复性相结合，是一种能够为您提供高精度性能和长期稳定性并且经济有效的测量仪器。结果：使运营投资价值和回报最大化。

关键应用

化学品与石化分析和试验过程
实验室和分析系统
生命科学实验室
薄膜气相沉积
热处理、切割等其他热过程
真空应用

选择最适合自身工艺需求的质量流量设备。

产品

	SLA 系列	GF40 系列	5850E 系列	SLAMf 系列	5700 系列
产品类型	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Meter
区别	Wide Flow & Pressure Range Superior Long-term Stability High Accuracy	High Accuracy MultiFlo™ Capability Compact Size Suitable for Full Suite of Gases	Proven Reliable Performance Long Term Stability Easy to Change Range and Recalibrate in the Field	IP66 Approved Enclosure Perfect for Hose Down/Wash Down Applications Hazardous Area Approvals	Economical Compact Ideal Upgrade from Volumetric Devices
流量范围-满量程容量	.003 - 2500 slpm	3 sccm - 50 slpm	0 - 1000 slpm	.003 - 2500 slpm	0 - 50 slpm
密封材料	Elastomer Seal	Elastomer Seal	Elastomer Seal	Elastomer Seal	Stainless Steel
最大压力	.003-200 slpm: 1500 psi/103 bar 100 - 2500 slpm: 1000 psi/70 bar Optional 4500 psi/310 bar on 50 slpm max device	150 psig/10 bar	Controllers: 1500 psig Meters: up to 4500 psig on some models	Up to 100 lpm: 1500 psi/100 bar Up to 50 lpm: 4500psi/310 bar (optional) 100-2500 lpm: 1000 psi/70 bar	150 psig
精度	17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69) ±0.6% of SP (20-100% FS) ±0.12% of FS (<20% FS) 1100 slpm up to 2500 slpm: ±0.6% of FS Standard Devices (includes uncertainty from reference standards ±0.9% of SP (20-100% FS) ±0.18% of FS (2-20% FS) 1100 slpm up to 2500 slpm: ±1.0% of FS	1% of SP 35-100%, 0.35% of FS 2-35%	1% of FS 1.5% of FS > 20 slpm	17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69) ±0.6% of SP (20-100% FS) ±0.12% of FS (<20% FS) 1100 slpm up to 2500 slpm: ±0.6% of FS Standard Devices (includes uncertainty from reference standards ±0.9% of SP (20-100% FS) ±0.18% of FS (2-20% FS) 1100 slpm up to 2500 slpm: ±1.0% of FS	5% of FS including linearity
重复性	0.20% SP	0.20% SP	0.25% of Rate	0.20% SP	0.50% FS
多气体多量程	Standard	MultiFlo™ Available	—	Standard	—
诊断能力	Available	Available	—	Available	—
模拟通讯	0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA	0-5 V, 0-10 V 0-20 mA, 4-20 mA	0-5 Vdc 0-20 mA 4-20 mA	0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA	0-5 V into 1000 ohms or greater
数字通讯	DeviceNet™ EtherCAT® EtherNet/IP™ Profibus® PROFINET RS-485	DeviceNet^TM EtherCAT® Profibus® RS485	—	DeviceNet™ EtherNet/IP™ Profibus® PROFINET RS-485	—
大小	Medium	Compact	—	Large	Compact
认证和批准	ISO/IEC 17025:2005 CE: EMC Directive 2014/30/EU Directive 2011/65/EU UL (Recognized): Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 Class II, Zone 22 ATEX: II 3 G Ex nA IIC T4 Gc IECEx: II 3 G Ex nA IIC T4 Gc KOSHA: Ex nA IIC T4	CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) Safety EN61010-1	—	ISO/IEC 17025:2005 CE: EMC, RoHs, PED UL Listed/Recognized: Class 1, Div 2, Group A,B,C,D Class 1, Zone 2, IIC T4, Class II, Zone 22 ATEX: II 3 G Ex nA IIC T4 Gc II 3 D Ex tc IIIC T 85°C Dc IECEx: Ex nA IIC T4 Gc Ex tc IIIC T 85°C Dc KOSHA: Ex nA IIC T4 Ex tc IIIC T85°C Dc	—