{A20011D5-683C-490E-B4CD-EE579093A5C6}
产品类型
Mass Flow Controller
{CBF4FD4D-CE24-4C7D-9D56-4D41A10F5B8A}
区别
Highest Flow Accuracy
Highest Operating Temperature
Digital Communication
{CAD8854A-287E-4ED2-AC93-15A6E05D0E3A}
{E8262BB0-3AA1-4551-AC72-BE307940CA15}
流量范围-满量程容量
10 slm (N2 equivalent)
{824BAA21-5BC9-4F88-A8E7-D22AF3AF0D20}
精度
1% of SP@ 35 - 100% FS
0.35% of FS @ <35% FS
{BF9194EC-A2F4-4E97-9159-618027CF7039}
{58B624C6-C290-47B4-AA1F-251F8C96F355}
线性
±0.5% FS (included in accuracy)
{0EFDF622-0BA3-41EA-AA47-62F397B5A7DE}
响应时间-常闭
<1 sec to within 2% of SP (per SEMI E17-91)
{26BD560D-3312-4EAC-9C30-2DE7D92CBB0A}
{CB1577DB-8FD1-46BD-91CB-5CC71DF2459C}
{04E0F69D-D90A-45BF-A829-268407403732}
{D04C0426-191D-409C-977D-14EADE8684EB}
{F6731195-1EAE-4E90-8CB5-F389B6EC2B8E}
接液材料
316L SS/ KM-45/ 304 SS/ MO+
{9022F4F6-F2C1-4294-9370-B2062A70D822}
阀门
Normally Closed
Meter (no valve)
{A13A01CD-108C-46FD-806C-D1B45508FE91}
{569EE9BF-0811-4AED-AC79-CF44B7A5A1BF}
{BBA5E8AE-CFCE-40C6-AA39-F480974398A1}
压差范围
1.33 - 350 kPa (10 torr - 50 psia)
*Contact Brooks Technical Support for more information.
{CF58B0E8-F777-456F-B8A4-3B835E603257}
{4866EC39-7F22-4B9F-972B-4C5FA55D6920}
{6A2E03D6-A721-4A16-B083-45FB4ED6CE07}
{07C2BA46-FFB3-4949-A447-8B6464F581D8}
{1ACCA391-8001-44CB-AC46-95AC43849DCD}
{7E43B8A4-07B4-44F2-B751-18DBC16E323A}
数字通讯
RS485 L-Protocol (via dual RJ11 ports)
{498BD734-305A-4FD6-B927-5037B9B93915}
电气连接
Analog via 9- or 15-Pin "D" connector & 20 Pin Card Edge connector
{0E109AAD-3260-4A46-B322-6D8937422B1D}
电源-功耗
Controller (Analog & RS-485L): 5 Watts max @ ±15 Vdc (160 mA max)
Meter (Analog): 5 Watts max @ ±15 Vdc (50 mA max)