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产品 质量流量控制器 橡胶密封 SLAMf 系列

SLAMf 系列橡胶密封热式质量流量计和控制器

精准的质量流量控制，针对苛刻使用环境进行了强化
型号 SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64

无论是灰尘、湿度、温度极限或是冲洗条件下，SLAMf 系列橡胶密封热式质量流量计和控制器均能够表现出经验证的 SLA5800 系列仪表和控制器的高精度特性和长期稳定性。专门设计的 NEMA4X/IP66 外壳可保护产品先进的数显电子元件并确保气体和液体质量流量（对过程要求严格）测量和控制的稳定和准确。

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

得到报价

SLAMf 系列数据表

特点

  • NEMA4X/IP66 级加固外壳
  • 适用的流量额定值范围宽 - 0.003 至高达 2500 lpm
  • 适用于各种温度和压力条件
  • 行业领先的热流量测量传感器技术为你提供出色的测量精度
  • 可编程多气体/多范围功能
  • 采用先进的常规自检功能并配有独立的诊断维护端口，因此用户无需拆除 MFC 即可进行故障排除或流量条件切换
  • 包括 DeviceNet™、EtherCAT®、Profibus® 和 RS-485加模拟接口在内的各种通信选件

优势

  • 加固的设备外壳可为工艺精度和苛刻条件下的控制性能提供保障
  • 独有的热感测技术可在低设定值条件下提供绝佳的信噪比
  • 传感器的长期稳定性可降低对维护和定期校准的要求
  • 选择一台设备即可设定多达六种不同的气体校准信息
  • 对用户开放的服务端口简化了安装、故障排除和诊断操作
  • 得益于基于国际标准的高级计量系统和校准技术，产品拥有出色的测量精度
  • 多协议通信接口可简化向现有系统的集成操作

应用

  • 化学与石化行业试验工场
  • 生命科学实验室
  • 食品加工中的氮封
{4D39703F-8431-4E00-AAAF-E32A63224B73}
产品类型
Mass Flow Controller
{D253B33E-C5F3-4DDA-BD34-73FFC0C232FA}
区别

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

{67DC4ABD-6777-4374-A573-7D0D966C728D}
性能
{9AAFFE42-6B76-4D6E-93E5-BECEAA6F8668}
流量范围-满量程容量
.003 - 2500 slpm
{0B64BBEC-4BB7-4FED-9357-592DD5690A75}
精度

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS


Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

{26C11D89-3C54-4E7D-8888-5556E24F7DE1}
重复性

0.20% SP

{1D81766F-E683-411F-B8B7-7DF8FB04B1AF}
线性

Included in Accuracy

{4CF87FD8-F072-4D48-A130-093BC919EBAE}
响应时间-常闭

<1 second up to 100 lpm

<3 seconds up to 2500 lpm

{7F7303B9-21F0-4DB8-B19A-DD6744F98098}
多气体多量程

Standard

{5786AAD7-7C1E-4073-98EF-2E9C159850E3}
最大压力

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

{7FC46212-0BAA-4696-B5DA-9170F8547A94}
控制范围

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

{5F2CA8BE-E327-46C6-A3BB-0D820D401F43}
零点稳定性

< 0.2% F.S. per year

{036F2FE9-02A0-4D8B-8038-2E478D431EE1}
温度系数

Zero: <0.05% of F.S. per °C

Span: < 0.1% of S.P. per °C

{5E5CD617-7F04-4615-8737-FE8E3FFE18E9}
压力系数

±0.03% per psi (0-200 psi N2)

{836190EB-84E2-4D7B-B0A8-E3755CCD2B95}
灵敏度

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

{636DEA02-86E7-4C2A-99C4-A35955A98A42}
等级
{926B9E2B-B423-48C5-B970-149010D48B39}
最大温度
65oC
{7688D2A8-C7B4-4E0B-99C6-A09793B8432B}
压差范围

Controllers

Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max

50-100 lpm: 10 psi/0.69 bar min -  50 psi/3.45 bar max

500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max

1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max

2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max

 

{5A7962B1-CCBE-433E-9949-3A00D3E1CCEB}
漏率
1x10-9 atm cc/sec He
{FD1D1004-5C0F-4B63-932C-35138114F6EA}
机械

{564301AE-2597-47D3-B01A-D1EA5035CE62}
密封材料
Elastomer Seal
{E25F7667-7768-49A8-BC0A-E0825FA74744}
接液材料

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

{F382B259-19AC-405F-B302-6B9714656C5C}
阀门

Normally Closed

Normally Open

Meter (no valve)

{E453CD3F-EB1B-46A0-9AB5-289E0F2F94F0}
诊断

 

{C2E26E76-7B9F-4B24-9F5E-CBA3D18D1EC0}
诊断能力
Available

{C3E267C1-0306-43D2-81C0-4E56D6E3631C}
状态灯

MFC Health, Network Status

{C6339274-4BFE-4E18-8B94-C9FA3F25F2A2}
报警

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

{8BE7F605-87D9-4DB9-BB89-ABD70731BEB2}
诊断/服务端口

RS485 via 2.5mm jack

{53E159A3-B49E-43ED-981A-019A342A4332}
电气

{8B595ECE-164D-4211-B642-A97342BB1B00}
模拟通讯
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



{04455110-D658-42D9-B6F0-121BA12BAAFB}
数字通讯
DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485 
{9225A0F9-07BD-427C-B176-FC5179F41675}
电气连接

DeviceNet™: 1 x M12 with threaded coupling nut (B)

Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

{71103481-4143-41CD-8B6E-75BB5C0B18B1}
电源-功耗

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts

{5B59C62B-86F8-4735-A7B7-52F770F486E3}
承诺
{69B425DA-C564-46AC-BFDF-92D19720A61D}
认证和批准

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

{76045893-80DF-43BE-B8AD-00E586A83EDD}
符合环保要求

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

{1109E7B2-CEF9-4302-8A6E-E217BF7B1706}
大小
Large
SLAMf50 SLAMf51 SLAMf53 SLAMf60 SLAMf61 SLAMf63 SLAMf64
产品类型 Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter Mass Flow Meter Mass Flow Meter Mass Flow Meter
区别

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

流量范围-满量程容量 0.003 - 50 slpm 15 - 200 slpm 100 - 2500 slpm 0.003 - 50 slpm 15 - 200 slpm 100 - 2500 slpm 300 - 36,000 slpm
最大压力 1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar 1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar Flow Rate Dependent
精度

±0.6% of SP

±0.6% of SP

100 - 1100 lpm

±0.6% of SP

1100 - 2500 lpm

±0.6% of FS

±0.6% of SP

±0.6% of SP

100 - 1100 lpm

±0.6% of SP

1100 - 2500 lpm

±0.6% of FS

 ±1.0% of FS
重复性 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. ±0.25% S.P.
响应时间-常闭 <1 second <1 second <3 seconds <1 second <1 second <3 seconds N/A
多气体多量程 Standard Standard Standard Standard Standard Standard Standard
诊断能力

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack
模拟通讯

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA
数字通讯

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485

DeviceNet™

EtherNet/IP™

FOUNDATIONTM Fieldbus

Profibus®

PROFINET

RS-485
文件名 文件类型 文档语言
Data-Sheet-SLAMF pdf Chinese English French German Japanese
sla-series-biotech-at-a-glance pdf Chinese English German
Installation & Operation Manual pdf English Japanese
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
EtherNet/IP™ Supplemental Manual (Prod Rev 4) pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
PROFINET Supplemental Manual SLA5800, SLAMf pdf English German
RS485 Supplemental Manual - SLA5800, SLAMf pdf English
0250 读数应用
0250 读数应用
Controls and powers up to 4 devices
0260 系列
0260 系列
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.
Brooks LabVIEW™ DLL
Brooks LabVIEW™ DLL
能让用户与布鲁克斯的数字质量流量控制计，压力控制计和二次仪表建立通讯。DLLs是在用户需要在LabVIEW™创建自己新的应用时使用。
Smart DDE 软件
Smart DDE 软件

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.