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CSTIC and SEMICON CHINA 2018: Brooks Instrument to Present New Mass Flow Controller With Self-Diagnostics

February 09, 2018
Technology experts to deliver presentation and exhibit newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics

Brooks Instrument 为 MT3809 系列可变面积流量计增添 FOUNDATION™ Fieldbus 变送器

March 14, 2018
新数字通讯协议的变送器能更容易地把大众化的MT3809流量计整合到工厂企业的自动控制系统中。

CSTIC and SEMICON CHINA 2018: Brooks Instrument to Present New Mass Flow Controller With Self-Diagnostics

February 09, 2018
Technology experts to deliver presentation and exhibit newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics

SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

July 11, 2016
Powerfully enhanced GF100 Series MFCs will help improve semiconductor process performance, productivity and yields.