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产品类型
Mass Flow Controller
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区别
Large installed base with proven long term performance
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重复性
±0.05% or ±[0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
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响应时间-常闭
SS Controller: <2 sec
SS Meter: <0.5 sec
Alloy C-22 Controller: <12 sec
Alloy C-22 Meter: <0.5 sec
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流量范围-满量程容量
10 - 27,000 gram/hr
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精度
Standard Flow Accuracy (below) or [(zero stability/flow rate) x 100]% of rate, whichever is greater
Liquid: 0.2% of rate
Gas: 0.5% of rate
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压差范围
Liquid: 10 - 200 psi
Gas: 10 - 150 psi
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密度范围
0 to 0.3 and 0.5 to 2.0 g/cc
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漏率
Elastomer: Outboard 1 x 10-9 atm. cc/sec, helium (max)
Metal Seal: 1 x 10-10 atm. cc/sec, helium (max)
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接液材料
316L, 316L VAR, High Alloy Ferritic Stainless & 17-7PH
Optional: Alloy C-22 Sensor Tube
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外壳
Standard: IP40
Optional: IP66
Optional: IP66XP
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进口过滤器
Size 2 Sensor: 1 & 10 micron
Size 3 & 4 Sensors: 10, 20, 30 & 40 micron
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接头
1/16”, 1/8”, 1/4” or 6mm tube compression, VCR, VCO or NPT(F), 3.2 mm UPG,
Downport ANSI/ISA 76.00.02 (See Model Code)
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最大压力
Standard Internal Valve: 500 psig
Optional Internal Valve: 1500 psig
Optional Remote Valve: 4500 psig
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电气连接
IP40: 15 pin D-Type connector
IP66: Unpluggable Terminal Block 28-16 Awg
IP66XP: 3/4” NPT wiring access to IP40 device with 15 pin D-Type connector
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电源-功耗
Voltage: +14 - 27 Vdc
Nominal Current: 300 - 300 mA (controller); 100 - 150 mA (meter)
Maximum Current: 715 mA @ 14 Vdc (controller); 470 mA @ 14 Vdc (meter)
Maximum Power: 10.0 W (controller); 6.6 W (meter)
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