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SLA5800 系列橡胶密封热式质量流量计和控制器

提升并简化质量流量控制
型号 SLA5850 / SLA5860 / SLA5851 / SLA5861 / SLA5853 / SLA5863

试想,仅需一个质量流量控制器平台即可操控同一过程中的十四种不同压力或流速。另一方面,还能够同时确保输出效果严格相同并具有高精度和可重复性。这就是 SLA5800 系列质量流量计和控制器所能够带给您的先进简化效果。

SLA5800 系列的特点是高精度、高零点稳定性以及高重复性,而上述特性正是行业领先者对质量流量测量和控制技术的需求所在。产品设计采用先进的可配置多气体/多量程功能,相较于竞争产品拥有更好的零点漂移参数并且经确证能够更持久地保持出厂校准状态和精度。

如有疑问

请与我们的应用工程专家取得联系:

联系电话: + 86-21-38720770 传真

SLA5800 系列数据表

特点

  • 长期零点稳定性,每年变动小于满量程的 0.2%
  • 高精度
  • 流量范围宽 - 从0.003一直到 2500 lpm
  • 最高耐压等级 - 高达 1500 psi/100 bar(可选:4500 psi/310 bar)
  • 可编程多气体/多量程功能
  • 可单独轻松访问的诊断/维护端口
  • 包括 DeviceNet™、EtherCAT®、Profibus® 和 RS-485加模拟接口在内的各种通信选择
  • 采用模块化设计,无论在工厂或是现场使用均非常易于维护

优势

  • 传感器的长期稳定性可降低对维护和定期校准的要求,从而降低总体经营成本
  • 布鲁克斯仪器独有的热感测技术可提供绝佳的信噪比性能从而提升低设定值条件下的测量和控制精度
  • 选择一个设备平台即可满足不同气体和流量范围的需求
  • 可存储并预先设定多达六种气体校准信息,用户仅需一台设备即可在不同气体和量程间轻松切换并减少库存
  • 对用户开放的服务端口简化了安装、故障排除和诊断操作并且不会干扰流量控制器工作
  • 耐用、稳定的金属顶盖可防止设备在安装期间受损
  • 多协议通信接口可简化向现有系统的集成操作
  • 基于国际标准的高级计量系统和初级校准系统可确保设备精度

应用

  • 化学品和石化催化剂研究和试验过程
  • 实验室和分析系统
  • 燃料电池技术
  • 生命科学实验室
产品类型
Mass Flow Controller
区别

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

性能
流量范围-满量程容量
.003 - 2500 slpm
精度

0.9% of SP (20-100% FS)

0.18% of FS (2-20% FS)

1-50 slpm: 0.18% of SP (1-20% FS)

1100 slpm up to 2500 slpm: 1.0% of FS

重复性

0.20% SP

线性

Included in accuracy

响应时间-常闭

0.003 - 100 slpm: <1 second

100 - 2500 slpm: <3 seconds

多气体多量程

Standard

最大压力

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

控制范围

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

零点稳定性

< 0.2% F.S. per year

温度系数

Zero: <0.05% of F.S per oC

Span: <0.1% of S.P. per oC

压力系数

0.03% per psi (0-200 psi N2)

灵敏度

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

等级
最大温度
65oC
压差范围

Controllers

.003 - 50 lpm: 5 psi / 0.35 bar

50 - 100 lpm: 10 psi / 0.69 bar

500 lpm: 7.5 psi / 0.52 bar

1000 lpm: 14.5 psi / 1.00 bar

2500 lpm: 35.0 psi / 2.41 bar

 

漏率
1x10-9 atm cc/sec He
机械

密封材料
Elastomer Seal
接液材料

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

阀门

Normally Closed

Normally Open

Meter (no valve)

诊断

诊断能力
Available

状态灯

MFC Health, Network Status

报警

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

诊断/服务端口
RS485 via 2.5mm jack

电气

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

数字通讯
DeviceNet™
EtherCAT®
FOUNDATIONTM Fieldbus
Profibus®
RS-485 
电气连接

DeviceNet™: 1xM12 with threaded coupling nut (B)

Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

电源-功耗

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts

承诺
认证和批准

CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

符合环保要求

RoHS

大小
Medium
SLA5850 SLA5860 SLA5851 SLA5861 SLA5853 SLA5863
产品类型 Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter
区别

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

流量范围-满量程容量 0.003 - 50 slpm 0.003 - 50 slpm 15 - 200 slpm 15 - 200 slpm 100 - 2500 slpm 100 - 2500 slpm
最大压力

1500 psi / 103 bar

Optional 4500 psi / 310 bar

1500 psi / 103 bar

Optional: 4500 psi / 310 bar

1500 psi / 103 bar 1500 psi / 103 bar 1000 psi / 70 bar 1000 psi / 70 bar
精度

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

重复性 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P.
响应时间-常闭 <1 second <1 second <1 second <1 seconds <3 seconds

<3 seconds

多气体多量程 Standard Standard Standard Standard Standard Standard
诊断能力

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

模拟通讯

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

数字通讯

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

DeviceNet™

EtherCAT® 

FOUNDATIONTM Fieldbus 

Profibus®

RS-485

FilenameFile TypeDocuments By Language
Data Sheet pdf English German
Installation & Operation Manual pdf English
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
RS485 Supplemental Manual - SLA5800, SLAMf pdf English
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