产品类型
Mass Flow Controller
区别
Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases
流量范围-满量程容量
50 sccm - 40 slpm
精度
3.0% of FS
1.0% of FS (optional)
响应时间-常闭
Normally Closed Valve: 300 ms - <1 sec
压差范围
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
接液材料
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
输入和输出
0-5 Vdc,
4-20 mA, RS-232 (Standard with all analog I/O options)
电气连接
Two 15-pin D-sub connectors
- One for connection to the 4800 Series
- One for the remote connection
显示区域
28mm wide x 11mm high
电源要求
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.
电磁兼容性
EMC Directive 2004/108/EC: per EN 61326:2006
认证和批准
ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)
符合环保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006