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橡胶密封热式质量流量计和控制器

经验证具有极高灵活性,能够满足各种质量流量测量需求。

布鲁克斯仪器的橡胶密封质量流量计和控制器将工艺所需的准确性、可靠性和可重复性相结合,是一种能够为您提供高精度性能和长期稳定性并且经济有效的测量仪器。结果:使运营投资价值和回报最大化。

关键应用

  • 化学品与石化分析和试验过程
  • 实验室和分析系统
  • 生命科学实验室
  • 薄膜气相沉积
  • 热处理、切割等其他热过程
  • 真空应用

选择最适合自身工艺需求的质量流量设备。

产品

SLA 系列
SLA 系列
GF40 系列
GF40 系列
5850E 和 i 系列
5850E 和 i 系列
SLAMf 系列
SLAMf 系列
4800 系列
4800 系列
5700 系列
5700 系列
产品类型 Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter
区别

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Economical

Compact

Ideal Upgrade from Volumetric Devices

流量范围-满量程容量 .003 - 2500 slpm 3 sccm - 50 slpm

0 - 1000 slpm

.003 - 2500 slpm 50 sccm - 40 slpm

0  - 50 slpm

密封材料 Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal

Stainless Steel

最大压力

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

150 psig/10 bar

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

150 psig/10 barg

150 psig

精度

0.9% of SP (20-100% FS)

0.18% of FS (2-20% FS)

1-50 slpm: 0.18% of SP (1-20% FS)

1100 slpm up to 2500 slpm: 1.0% of FS

1% of SP 35-100%, 0.35% of FS 2-35%

1% of FS

1.5% of FS > 20 slpm

Up to 100 lpm: 0.90% of SP (20-100% FS)

0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm)

100 - 2500 lpm: 0.90% of SP (20-100% FS)

100 - 1100 lpm: 0.18% of FS (2-20% FS)

1100 - 2500 lpm: 1.0% of FS

3.0% of FS

1.0% of FS (optional)

5% of FS including linearity

重复性

0.20% SP

0.20% SP

0.25% of Rate

0.20% SP

0.15% FS

0.50% FS

多气体多量程

Standard

MultiFlo™ Available

Standard

诊断能力 Available

Available

Available

Available

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 Vdc
0-20 mA
4-20 mA

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



0-5 Vdc
4-20 mA

0-5 V into 1000 ohms or greater

数字通讯 DeviceNet™
EtherCAT®
FOUNDATIONTM Fieldbus
Profibus®
RS-485 

DeviceNetTM
EtherCAT®
Profibus®
RS485


DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485





RS232


大小 Medium Compact Medium Large

Compact

Compact

认证和批准

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)