{6B8500CD-E0B2-4484-98F8-020AA736B5D0}
产品类型
Pressure Controller & Flow Meter
{FFC2FF86-9427-48CC-B0AA-845A1E620577}
区别
Control Mode: Downstream or Upstream
Remote Transducer
Wide Flow & Pressure Range
{05400E48-1E61-44D0-81A9-5779A3F49264}
{A8A93341-B802-4FD3-89BF-4E81CE170784}
流量范围-满量程容量
Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.
{829C7976-BE50-4D03-A41D-937485EB3168}
精度
±1% of rate 20-100% F.S.
±0.2% F.S. < 20% F.S.
{01247712-5A0A-4268-A2E8-768A1A8C8464}
{5160C967-F1BB-4895-B33C-7DD5622ACAA7}
温度系数
Zero: Less than 0.035% FS per °C
Span: Less than 0.1% of Rate per °C
{815BCCB6-644A-4A79-9A02-2BD7DE5F8082}
压力范围
Dependent upon remote pressure transducer, maximum 500 psig.
{377403FA-2DC8-4786-B83D-0201EAC5624F}
{22B38BD9-0F72-45C9-AED1-959AD203A470}
响应时间-常闭
< 1 sec typical for a 20-100% setpoint step with max 2% overshoot.
Actual pressure response depends on system design.
{9B192206-E575-49BA-A597-67EAAE26D5D0}
{46151B14-16A8-4C1B-B313-A321C14DFFEE}
{C43509B4-8508-4E0C-9AF9-9E9CEA9CFA36}
环境温度范围
Operating: 0°C to 60°C
Non-Operating: -25°C to 100°C
Fluid: 0°C to 65°C
{FFF868D2-06D4-4E5F-8DE6-F28C7F86B81E}
漏率
Inboard to Outboard
1 x 10-10 atm scc/sec Helium max
{12E9D148-8616-41F2-913E-62A36D094732}
{F338B6E3-71EA-441D-962D-F1878A11748A}
{5952A75C-EBC4-4C93-81BA-6B450F0E58BF}
{27ECE8E7-DE03-4C64-9BD5-06F6CE4544B4}
接液材料
316L Vacuum Arc Remelt (VAR)
316L
High-Alloy Ferritic Stainless Steel
External/Internal Seals: Nickel
Valve Seat: 316L Stainless Steel - standard
{EA904E18-B326-473C-8B1D-5DA15BB39636}
{08CE084D-960F-47F1-B8C8-3FE517D4AA95}
{410BEBB1-2D76-4090-A114-945FCEC0CD0D}
{1A02B62B-79F9-4E53-AD00-C1A4D7DB4A2B}
{088B442C-F11A-4F90-BD6F-FBFA9B7741E1}
{2E622D01-A432-455D-BA8F-3DDFCA1774AC}
电气连接
Analog via 15-Pin "D" Connector
DeviceNet™ via 5-Pin "M12" Connector
{ABEF4842-7738-4789-8129-FB34656B6164}
电源-功耗
Analog: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored)
DeviceNet™: 11 - 25 Vdc