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压力和真空产品
附件和软件 Cables, Filters, Valves, Secondary Electronics, Software
质量流量控制器和仪表
汽化产品
可变面积流量计(转子流量计)
半导体产品 Ultra-high purity products for the semiconductor industry
PC100 系列压力控制器和压力表结合大量高性能技术特点,为高要求的半导体、气相沉积和其他超精密制造工艺提供了新的压力控制准确度和可靠性水平。
建立于可靠的 Brooks GF100 质量流量控制器技术之上,PC100 系列特有高纯度全金属流路,专门设计的增强传感器技术以消除传感器漂移,以及用户界面和设备诊断能力,可使设备评价和故障排除更容易,产生有限的维修中断和减少停机时间。
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Control Mode: Downstream or Upstream
Ultra-High Purity
Digital Pressure Control
10 slm (N2 or H2 only)
Pressure Reading: ± 1% of reading
Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S.
Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S
< ±0.2% F.S.
Zero: < 0.05% F.S./°C
Span: < 0.08% of reading/°C
1000 Torr FS
> 2 to 100%
< 1 sec typ. (excluding system time constant)
External: 1 x 10-10 atm scc/sec He max
5 µ inch Ra
SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
Normally Closed
—
DeviceNet™
DeviceNet™ via 5-Pin "M12" Connector
DeviceNet™: 545 mA max @ +11-25 Vdc
EC Directive 2014/30/EU
CE: EN61326-1: 2013
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
Control Mode: Downstream and Upstream
Embedded Thermal Flow Sensor: No
Control Mode: Downstream
Embedded Thermal Flow Sensor: Yes
20 sccm - 5 slm (N2 and H2 only)
10 slm (N2 and H2 only)
Downstream: >2 to 100%
Upstream: >15 to 100%*
*Assuming hard vacuum on the outlet and 150 Torr min DP to achieve max flow
>2 to 100%
Transducer Pressure Range: 1000 Torr F.S.
Transducer Over Pressure Limit: 2 x F.S. range
Metal Seal